A highly accurate engineering of silicon integrated microring resonators based on the nanofabrication technique

Mikhail Erdmanis, Lasse Karvonen, Antti Säynätjoki, Seppo Honkanen, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

1 Citation (Scopus)
Original languageEnglish
Title of host publicationSPIE Photonics West, San-Francisco, CA, USA, 2-7, February 2013
EditorsJoel Kubby
Place of PublicationUSA
Pages1-6
DOIs
Publication statusPublished - 2013
MoE publication typeB3 Non-refereed article in conference proceedings

Keywords

  • atomic layer deposition
  • chromatic dispersion
  • optical waveguides
  • ring resonators
  • silicon photonics
  • thin films

Cite this

Erdmanis, M., Karvonen, L., Säynätjoki, A., Honkanen, S., & Tittonen, I. (2013). A highly accurate engineering of silicon integrated microring resonators based on the nanofabrication technique. In J. Kubby (Ed.), SPIE Photonics West, San-Francisco, CA, USA, 2-7, February 2013 (pp. 1-6). https://doi.org/10.1117/12.2007266