@article{257461395ef049aab71710afd250f265,
title = "A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity",
keywords = "Accelerometers, damping, delta-sigma analog-digital conversion, force feedback, high Q, microelectromechanical systems, open-loop systems, ratiometric output, self-balancing bridge, Accelerometers, damping, delta-sigma analog-digital conversion, force feedback, high Q, microelectromechanical systems, open-loop systems, ratiometric output, self-balancing bridge, Accelerometers, damping, delta-sigma analog-digital conversion, force feedback, high Q, microelectromechanical systems, open-loop systems, ratiometric output, self-balancing bridge",
author = "Mikail Yucetas and Mika Pulkkinen and Antti Kalanti and Jarno Salomaa and Lasse Aaltonen and Kari Halonen",
note = "VK: T4030/Yucetas",
year = "2012",
doi = "10.1109/JSSC.2012.2191675",
language = "English",
volume = "47",
pages = "1721--1730",
journal = "IEEE Journal of Solid-State Circuits",
issn = "0018-9200",
publisher = "IEEE",
number = "7",
}