A High-Resolution Accelerometer With Electrostatic Damping and Improved Supply Sensitivity

Mikail Yucetas, Mika Pulkkinen, Antti Kalanti, Jarno Salomaa, Lasse Aaltonen, Kari Halonen

Research output: Contribution to journalArticleScientificpeer-review

52 Citations (Scopus)
Original languageEnglish
Pages (from-to)1721-1730
JournalIEEE Journal of Solid-State Circuits
Volume47
Issue number7
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

Keywords

  • Accelerometers
  • damping
  • delta-sigma analog-digital conversion
  • force feedback
  • high Q
  • microelectromechanical systems
  • open-loop systems
  • ratiometric output
  • self-balancing bridge

Cite this