@inproceedings{e8c7daf11c314410b5c77ced22f1f322,
title = "A detailed study on the growth of CaS thin films by atomic layer epitaxy",
keywords = "atomic layer epitaxy (ALE), calcium sulfide, growth rate, thin films, atomic layer epitaxy (ALE), calcium sulfide, growth rate, thin films, atomic layer epitaxy (ALE), calcium sulfide, growth rate, thin films",
author = "J. Rautanen and M. Leskel{\"a} and L. Niinist{\"o} and E. Nyk{\"a}nen and Pekka Soininen",
year = "1993",
language = "English",
booktitle = "TKK-Tartu {\"U}likool 2nd ALE Symposium",
publisher = "Tartu {\"U}likool ",
address = "Estonia",
}