A detailed study on the growth of CaS thin films by atomic layer epitaxy

J. Rautanen, M. Leskelä, L. Niinistö, E. Nykänen, Pekka Soininen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationTKK-Tartu Ülikool 2nd ALE Symposium
    Place of PublicationTartu
    PublisherTARTU ÜLIKOOL
    Publication statusPublished - 1993
    MoE publication typeA4 Article in a conference publication

    Keywords

    • atomic layer epitaxy (ALE)
    • calcium sulfide
    • growth rate
    • thin films

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