@article{77440a5ffc0a4c4d893ff30beb386efe,
title = "A comparative study on lanthanide oxide thin films grown by atomic layer deposition",
keywords = "ALD, atomic layer deposition, electrical measurements, electrical properties, lanthanides, oxides, ALD, atomic layer deposition, electrical measurements, electrical properties, lanthanides, oxides, ALD, atomic layer deposition, electrical measurements, electrical properties, lanthanides, oxides",
author = "Jani P{\"a}iv{\"a}saari and Matti Putkonen and Lauri Niinist{\"o}",
year = "2005",
language = "English",
volume = "472",
pages = "275--281",
journal = "Thin Solid Films",
issn = "1879-2731",
publisher = "Elsevier",
number = "1-2",
}