A cavity with a movable mirror at cryogenic temperature

G. Breitenbach; T. Kalkbrenner; I. Tittonen; J. Mlynek; S. Schiller

A cavity with a movable mirror at cryogenic temperature

G. Breitenbach, T. Kalkbrenner, I. Tittonen, J. Mlynek, S. Schiller

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	EQEC'98, Glasgow, Scotland, 14.-18.9.1998
Pages	183
Publication status	Published - 1998
MoE publication type	A4 Conference publication

Keywords

fabry-perot interferometer
hihg-Q oscillator
silicon micromechanics

Cite this

@inproceedings{1ef4a5c5f5a54440951d2a44900f1ed0,

title = "A cavity with a movable mirror at cryogenic temperature",

keywords = "fabry-perot interferometer, hihg-Q oscillator, silicon micromechanics, fabry-perot interferometer, hihg-Q oscillator, silicon micromechanics, fabry-perot interferometer, hihg-Q oscillator, silicon micromechanics",

author = "G. Breitenbach and T. Kalkbrenner and I. Tittonen and J. Mlynek and S. Schiller",

year = "1998",

language = "English",

pages = "183",

booktitle = "EQEC'98, Glasgow, Scotland, 14.-18.9.1998",

}

TY - GEN

T1 - A cavity with a movable mirror at cryogenic temperature

AU - Breitenbach, G.

AU - Kalkbrenner, T.

AU - Tittonen, I.

AU - Mlynek, J.

AU - Schiller, S.

PY - 1998

Y1 - 1998

KW - fabry-perot interferometer

KW - hihg-Q oscillator

KW - silicon micromechanics

KW - fabry-perot interferometer

KW - hihg-Q oscillator

KW - silicon micromechanics

KW - fabry-perot interferometer

KW - hihg-Q oscillator

KW - silicon micromechanics

M3 - Conference article in proceedings

SP - 183

BT - EQEC'98, Glasgow, Scotland, 14.-18.9.1998

ER -