A capacitive ultrasonic transducer with a net grid backplate

Pentti Mattila, Jyrki Stor-Pellinen, Janne Ignatius, Jarmo Hietanen, Mauri Luukkala

Research output: Contribution to journal › Article › Scientific › peer-review

12 Citations (Scopus)

Original language	English
Pages (from-to)	1119-1125
Journal	Measurement Science and Technology
Volume	11
Issue number	8
DOIs	https://doi.org/10.1088/0957-0233/11/8/304
Publication status	Published - 2000
MoE publication type	A1 Journal article-refereed

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title = "A capacitive ultrasonic transducer with a net grid backplate",

author = "Pentti Mattila and Jyrki Stor-Pellinen and Janne Ignatius and Jarmo Hietanen and Mauri Luukkala",

year = "2000",

doi = "10.1088/0957-0233/11/8/304",

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T1 - A capacitive ultrasonic transducer with a net grid backplate

AU - Mattila, Pentti

AU - Stor-Pellinen, Jyrki

AU - Ignatius, Janne

AU - Hietanen, Jarmo

AU - Luukkala, Mauri

PY - 2000

Y1 - 2000

U2 - 10.1088/0957-0233/11/8/304

DO - 10.1088/0957-0233/11/8/304

M3 - Article

SN - 1361-6501

VL - 11

SP - 1119

EP - 1125

JO - Measurement Science and Technology

JF - Measurement Science and Technology

IS - 8

ER -