A capacitive ultrasonic transducer with a net grid backplate

M. Luukkala, Jarmo Hietanen

    Research output: Contribution to journalArticleScientificpeer-review

    9 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1119-1125
    JournalMeasurement Science and Technology
    Volume11
    Publication statusPublished - 2000
    MoE publication typeA1 Journal article-refereed

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