A calibration-free method to assess the quality of standards for THz on-wafer measurements

Maxim Masyukov, Irina Nefedova, Aleksi Tamminen, Kimmo Silvonen, Juan Cabello-Sanchez, Mikko Varonen, Mikko Kantanen, Helena Rodilla, Jan Stake, Zachary Taylor

Research output: Contribution to conferenceAbstractScientificpeer-review

Abstract

A method to assess the quality of the calibration standards has been developed and tested. The actual response of the tested transmission lines for LRRM-16 calibration approach has been simulated in HFSS environment, fabricated, and tested with on-wafer measurement setup. The method for quality assessment is based on the properties of similar matrices, that compares traces and determinants of the S-parameters products for fabricated and simulated structures.

Original languageEnglish
Number of pages2
DOIs
Publication statusPublished - 2022
MoE publication typeNot Eligible
EventInternational Conference on Infrared, Millimeter, and Terahertz Waves - Delft, Netherlands
Duration: 28 Aug 20222 Sept 2022
Conference number: 47

Conference

ConferenceInternational Conference on Infrared, Millimeter, and Terahertz Waves
Abbreviated titleIRMMW-THz
Country/TerritoryNetherlands
CityDelft
Period28/08/202202/09/2022

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