A 20 µA Front-End for Three-Axis Capacitive Microaccelerometers

Mika Kämäräinen, Mikko Saukoski, Matti Paavola, Kari Halonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    3 Citations (Scopus)
    Original languageEnglish
    Title of host publicationInstrumentation and Measurement Technology Conference IMTC’07. May 1-3, 2007, Varsaw, Poland
    Pages1-5
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

    Keywords

    • CMOS integrated circuit
    • electrostatic forces
    • self-balancing bridge
    • three-axis capacitive microaccelerometer

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