A 12 MHz Micromechanical Bulk Acoustic Mode Oscillator

T. Mattila; J. Kiihamäki; Tuomas Lamminmäki; O. Jaakkola; Pekka Rantakari; Aarne Oja; H. Seppä; H. Kattelus; Ilkka Tittonen

doi:10.1016/S0924-4247(02)00204-2

A 12 MHz Micromechanical Bulk Acoustic Mode Oscillator

T. Mattila
, J. Kiihamäki
, Tuomas Lamminmäki
, O. Jaakkola
, Pekka Rantakari
, Aarne Oja
, H. Seppä
, H. Kattelus
, Ilkka Tittonen

Research output: Contribution to journal › Article › Scientific › peer-review

137 Citations (Scopus)

Abstract

We demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.

Original language	English
Pages (from-to)	1-9
Journal	Sensors and Actuators A: Physical
Volume	A 101
DOIs	https://doi.org/10.1016/S0924-4247(02)00204-2
Publication status	Published - 2002
MoE publication type	A1 Journal article-refereed

Keywords

Acoustic wave
RF mems
micromechanic resonator
bulk acoustic wave
electromechanical coupling
oscillator noise

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10.1016/S0924-4247(02)00204-2

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title = "A 12 MHz Micromechanical Bulk Acoustic Mode Oscillator",

abstract = "We demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.",

keywords = "Acoustic wave, RF mems, Acoustic wave, RF mems, Acoustic wave, RF mems, micromechanic resonator, bulk acoustic wave, electromechanical coupling, oscillator noise",

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doi = "10.1016/S0924-4247(02)00204-2",

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T1 - A 12 MHz Micromechanical Bulk Acoustic Mode Oscillator

AU - Mattila, T.

AU - Kiihamäki, J.

AU - Lamminmäki, Tuomas

AU - Jaakkola, O.

AU - Rantakari, Pekka

AU - Oja, Aarne

AU - Seppä, H.

AU - Kattelus, H.

AU - Tittonen, Ilkka

PY - 2002

Y1 - 2002

N2 - We demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.

AB - We demonstrate a bulk acoustic mode silicon micromechanical resonator with the first eigen frequency at 12 MHz and the quality factor 180 000. Electrostatic coupling to the mechanical motion is shown to be feasible using a high bias voltage across a narrow gap. By using a low-noise preamplifier to detect the resonance, a high spectral purity oscillator is demonstrated (phase noise less than −115 dBc/Hz at 1 kHz offset from the carrier). By analyzing the constructed prototype oscillator, we discuss in detail the central performance limitations of using silicon micromechanics in oscillator applications.

KW - Acoustic wave

KW - RF mems

KW - Acoustic wave

KW - RF mems

KW - Acoustic wave

KW - RF mems

KW - micromechanic resonator

KW - bulk acoustic wave

KW - electromechanical coupling

KW - oscillator noise

U2 - 10.1016/S0924-4247(02)00204-2

DO - 10.1016/S0924-4247(02)00204-2

M3 - Article

SN - 0924-4247

VL - A 101

SP - 1

EP - 9

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -

A 12 MHz Micromechanical Bulk Acoustic Mode Oscillator

Abstract

Keywords

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