3D FEM simulations of perforated MEMS gas dampers

Timo Veijola

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    2 Citations (Scopus)
    Original languageEnglish
    Title of host publicationDesign, Test, Integration and Packaging of MESMS/MOEMS, Rome, Italy, 1-3 April, 2009
    Place of PublicationRome, Italy
    Pages243-250
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication

    Keywords

    • FEM
    • MEMS
    • perforation
    • squeeze-film damping

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