3D FEM modeling of thin-film composite BAW resonators

Tapani Makkonen, Antti Holappa, Juha Ellä, Martti M. Salomaa

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationJyväskylä
    Pages129
    Publication statusPublished - 2001
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameThe XXXV Annual Conference of the Finnish Physical Society, March 22.-24. 2001, Jyväskylä, Finland
    PublisherUniversity of Jyväskylä, Department of Physics

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