@techreport{4f2d258086f547c886bb88de4b2130d7,
title = "3D FEM modeling of thin-film composite BAW resonators",
author = "Tapani Makkonen and Antti Holappa and Juha Ell{\"a} and Salomaa, {Martti M.}",
year = "2001",
language = "English",
series = "The XXXV Annual Conference of the Finnish Physical Society, March 22.-24. 2001, Jyv{\"a}skyl{\"a}, Finland",
publisher = "University of Jyv{\"a}skyl{\"a}, Department of Physics",
pages = "129",
type = "WorkingPaper",
institution = "University of Jyv{\"a}skyl{\"a}, Department of Physics",
}