3D FEM modeling of crystal resonators

T. Makkonen, A. Holappa, J. Ellä, M.M. Salomaa

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe XXXIV Annual Conference of the Finnish Physical Society, Espoo, March 9-11, 2000
    EditorsM. Kaivola, E. Noponen
    Place of PublicationEspoo
    PublisherHelsinki University of Technology
    Pages5
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication

    Keywords

    • 3D simulations
    • BAW resonators
    • composite Bulk Acoustic Wave resonator
    • Finite Element Method

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