2D Modeling of laterally acoustically coupled thin film bulk acoustic wave resonator filters

T. Pensala, J. Meltaus, Markku Ylilammi, K. Kokkonen

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)2537-2549
JournalIEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Volume57
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

Keywords

  • bulk acoustic waves
  • simulation

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