1D Crystallographic Etching of Few-Layer WS2

Shisheng Li*, Yung Chang Lin, Yiling Chiew, Yunyun Dai, Zixuan Ning, Yaming Zhang, Hideaki Nakajima, Hong En Lim, Jing Wu, Yasuhisa Neitoh, Toshiya Okazaki, Yang Sun, Zhipei Sun, Kazu Suenaga, Yoshiki Sakuma, Kazuhito Tsukagoshi, Takaaki Taniguchi

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

Abstract

Layer number-dependent band structures and symmetry are vital for the electrical and optical characteristics of 2D transition metal dichalcogenides (TMDCs). Harvesting 2D TMDCs with tunable thickness and properties can be achieved through top-down etching and bottom-up growth strategies. In this study, a pioneering technique that utilizes the migration of in situ generated Na-W-S-O droplets to etch out 1D nanotrenches in few-layer WS2 is reported. 1D WS2 nanotrenches are successfully fabricated on the optically inert bilayer WS2, showing pronounced photoluminescence and second harmonic generation signals. Additionally, the modulation of inkjet-printed Na2WO4-Na2SO4 particles to switch between the etching and growth modes by manipulating the sulfur supply is demonstrated. This versatile approach enables the creation of 1D nanochannels on 2D TMDCs. The research presents exciting prospects for the top-down and bottom-up fabrication of 1D-2D mixed-dimensional TMDC nanostructures, expanding their use for electronic and optoelectronic applications.

Original languageEnglish
Article number2405665
JournalAdvanced Functional Materials
Volume34
Issue number46
Early online date2024
DOIs
Publication statusPublished - 12 Nov 2024
MoE publication typeA1 Journal article-refereed

Keywords

  • 1D nanotrenches
  • etching
  • photoluminescence
  • second harmonic generation
  • transition metal dichalcogenides

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