@article{3a13dec282cd4c068bca8ec132c45b04,
title = "14 MHz micromechanical oscillator",
keywords = "acoustic wave, Rf mems, acoustic wave, Rf mems, acoustic wave, Rf mems",
author = "Ilkka Tittonen and T. Mattila and O. Jaakkola and J. Kiiham{\"a}ki and T. Lamminm{\"a}ki and P. Rantakari and A. Oja and H. Sepp{\"a} and H. Kattelus",
year = "2002",
language = "English",
volume = "97-98",
pages = "497--502",
journal = "Sensors and Actuators A: Physical",
issn = "1873-3069",
publisher = "Elsevier",
}