14 MHz Micromechanical Oscillator

T. Mattila, O. Jaakkola, Jyrki Kiihamäki, J. Karttunen, T. Lamminmäki, P. Rantakari, A. Oja, H. Seppa, H. Kattelus, I. Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Original languageEnglish
    Title of host publicationTransducers '01 Eurosensors XV, Munich, Germany, June 10-14, 2001
    Pages1102-1105
    Publication statusPublished - 2001
    MoE publication typeA4 Conference publication

    Keywords

    • micromechanical oscillator
    • micromechanics
    • oscillator noise

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