14 MHz Micromechanical Oscillator

T. Mattila, O. Jaakkola, J. Kiihamaki, J. Karttunen, T. Lamminmäki, P. Rantakari, A. Oja, H. Seppa, H. Kattelus, I. Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationTransducers '01 Eurosensors XV, Munich, Germany, June 10-14, 2001
Pages1102-1105
Publication statusPublished - 2001
MoE publication typeA4 Article in a conference publication

Keywords

  • micromechanical oscillator
  • micromechanics
  • oscillator noise

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