@inproceedings{84763c9f29894bccb97ab165f43e8341,
title = "14 MHz Micromechanical Oscillator",
keywords = "micromechanical oscillator, micromechanics, oscillator noise, micromechanical oscillator, micromechanics, oscillator noise, micromechanical oscillator, micromechanics, oscillator noise",
author = "T. Mattila and O. Jaakkola and Jyrki Kiiham{\"a}ki and J. Karttunen and T. Lamminm{\"a}ki and P. Rantakari and A. Oja and H. Seppa and H. Kattelus and I. Tittonen",
year = "2001",
language = "English",
pages = "1102--1105",
booktitle = "Transducers '01 Eurosensors XV, Munich, Germany, June 10-14, 2001",
}