14 MHz micromechanical oscillator

Ilkka Tittonen, T. Mattila, O. Jaakkola, J. Kiihamäki, T. Lamminmäki, P. Rantakari, A. Oja, H. Seppä, H. Kattelus

Research output: Contribution to journalArticleScientificpeer-review

41 Citations (Scopus)
Original languageEnglish
Pages (from-to)497-502
JournalSensors and Actuators A
Volume97-98
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed

Keywords

  • acoustic wave
  • Rf mems

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