13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator

Pekka Rantakari; Ville Kaajakari; Jyrki Kiihamäki; Mika Koskenvuori; Ilkka Tittonen

13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator

Pekka Rantakari, Ville Kaajakari, Jyrki Kiihamäki, Mika Koskenvuori, Ilkka Tittonen

Department of Computer Science

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Proceedings of the XXXIX Annual Conference of the Finnish Physical Society
Editors	Tomi Ruokola, Juhani von Boehm
Publisher	Helsinki University of Technology
Publication status	Published - 2005
MoE publication type	A4 Conference publication
Event	Physics Days: Annual Meeting of the Finnish Physical Society - Espoo, Finland Duration: 17 Mar 2005 → 19 Mar 2005 Conference number: 39

Publication series

Name	Report / Helsinki University of Technology, Laboratory of Physics
Publisher	Helsinki University of Technology
Number	229

Conference

Conference	Physics Days
Country/Territory	Finland
City	Espoo
Period	17/03/2005 → 19/03/2005

Keywords

micromechanics
reference oscillator
rf-mems

Cite this

Rantakari, P., Kaajakari, V., Kiihamäki, J., Koskenvuori, M., & Tittonen, I. (2005). 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. In T. Ruokola, & J. von Boehm (Eds.), Proceedings of the XXXIX Annual Conference of the Finnish Physical Society (Report / Helsinki University of Technology, Laboratory of Physics; No. 229). Helsinki University of Technology.

Rantakari, Pekka ; Kaajakari, Ville ; Kiihamäki, Jyrki et al. / 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. Proceedings of the XXXIX Annual Conference of the Finnish Physical Society. editor / Tomi Ruokola ; Juhani von Boehm. Helsinki University of Technology, 2005. (Report / Helsinki University of Technology, Laboratory of Physics; 229).

@inproceedings{579d228cfa9f49ad8444bfa95c9cd1c4,

title = "13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator",

keywords = "micromechanics, reference oscillator, rf-mems, micromechanics, reference oscillator, rf-mems, micromechanics, reference oscillator, rf-mems",

author = "Pekka Rantakari and Ville Kaajakari and Jyrki Kiiham{\"a}ki and Mika Koskenvuori and Ilkka Tittonen",

year = "2005",

language = "English",

series = "Report / Helsinki University of Technology, Laboratory of Physics",

publisher = "Helsinki University of Technology",

number = "229",

editor = "Tomi Ruokola and {von Boehm}, Juhani",

booktitle = "Proceedings of the XXXIX Annual Conference of the Finnish Physical Society",

address = "Finland",

note = "Physics Days : Annual Meeting of the Finnish Physical Society ; Conference date: 17-03-2005 Through 19-03-2005",

}

Rantakari, P, Kaajakari, V, Kiihamäki, J, Koskenvuori, M & Tittonen, I 2005, 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. in T Ruokola & J von Boehm (eds), Proceedings of the XXXIX Annual Conference of the Finnish Physical Society. Report / Helsinki University of Technology, Laboratory of Physics, no. 229, Helsinki University of Technology, Physics Days, Espoo, Finland, 17/03/2005.

13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. / Rantakari, Pekka; Kaajakari, Ville; Kiihamäki, Jyrki et al.
Proceedings of the XXXIX Annual Conference of the Finnish Physical Society. ed. / Tomi Ruokola; Juhani von Boehm. Helsinki University of Technology, 2005. (Report / Helsinki University of Technology, Laboratory of Physics; No. 229).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator

AU - Rantakari, Pekka

AU - Kaajakari, Ville

AU - Kiihamäki, Jyrki

AU - Koskenvuori, Mika

AU - Tittonen, Ilkka

N1 - Conference code: 39

PY - 2005

Y1 - 2005

KW - micromechanics

KW - reference oscillator

KW - rf-mems

KW - micromechanics

KW - reference oscillator

KW - rf-mems

KW - micromechanics

KW - reference oscillator

KW - rf-mems

M3 - Conference article in proceedings

T3 - Report / Helsinki University of Technology, Laboratory of Physics

BT - Proceedings of the XXXIX Annual Conference of the Finnish Physical Society

A2 - Ruokola, Tomi

A2 - von Boehm, Juhani

PB - Helsinki University of Technology

T2 - Physics Days

Y2 - 17 March 2005 through 19 March 2005

ER -

Rantakari P, Kaajakari V, Kiihamäki J, Koskenvuori M, Tittonen I. 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. In Ruokola T, von Boehm J, editors, Proceedings of the XXXIX Annual Conference of the Finnish Physical Society. Helsinki University of Technology. 2005. (Report / Helsinki University of Technology, Laboratory of Physics; 229).