13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator

Pekka Rantakari, Ville Kaajakari, Jyrki Kiihamäki, Mika Koskenvuori, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings of the XXXIX Annual Conference of the Finnish Physical Society
EditorsTomi Ruokola, Juhani von Boehm
PublisherHelsinki University of Technology
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
EventPhysics Days: Annual Meeting of the Finnish Physical Society - Espoo, Finland
Duration: 17 Mar 200519 Mar 2005
Conference number: 39

Publication series

NameReport / Helsinki University of Technology, Laboratory of Physics
PublisherHelsinki University of Technology
Number229

Conference

ConferencePhysics Days
CountryFinland
CityEspoo
Period17/03/200519/03/2005

Keywords

  • micromechanics
  • reference oscillator
  • rf-mems

Cite this

Rantakari, P., Kaajakari, V., Kiihamäki, J., Koskenvuori, M., & Tittonen, I. (2005). 13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator. In T. Ruokola, & J. von Boehm (Eds.), Proceedings of the XXXIX Annual Conference of the Finnish Physical Society (Report / Helsinki University of Technology, Laboratory of Physics; No. 229). Helsinki University of Technology.