12 MHz Micromechanical Bulk Acoustic Mode Oscillator

Ilkka Tittonen, T. Mattila, J. Kiihamäki, Tuomas Lamminmäki, O. Jaakkola, Pekka Rantakari, Aarne Oja, H. Seppä, H. Kattelus

Research output: Contribution to journalArticleScientificpeer-review

127 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-9
JournalSensors and Actuators
VolumeA 101
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed

Keywords

  • Acoustic wave
  • RF mems

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