Unique ALD/MLD-Enabled Material Functions

Karppinen, Maarit (Principal investigator)
Ghazy, Amr (Project Member)
Kousar, Sajida (Project Member)
Jussila, Topias (Project Member)
Philip, Anish (Project Member)
Sederholm, Linda (Project Member)
Pekkanen, Joona (Project Member)
Francis, Malar (Project Member)
Partanen, Olga (Project Member)
Madadi, Milad (Project Member)

Department of Chemistry and Materials Science

6 Article
2 Review Article

2 results

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2024
Layer-Engineered Functional Multilayer Thin-Film Structures and Interfaces through Atomic and Molecular Layer Deposition
Heikkinen, M., Ghiyasi, R. & Karppinen, M., 28 Jun 2024, (E-pub ahead of print) In: Advanced Materials Interfaces. 33 p., 2400262.
Research output: Contribution to journal › Review Article › peer-review

Open Access
2023
Atomic layer deposition of magnetic thin films : Basic processes, engineering efforts, and road forward
Jussila, T., Philip, A., Tripathi, T., Nielsch, K. & Karppinen, M., 29 Dec 2023, In: Applied Physics Reviews. 10, 4, p. 1-36 36 p., 041313.
Research output: Contribution to journal › Review Article › peer-review

Open Access
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2 Citations (Scopus)

47 Downloads (Pure)