Unique ALD/MLD-Enabled Material Functions

Karppinen, Maarit (Principal investigator)
Riikonen, Oskar (Project Member)
Ishtiaq, Shadab (Project Member)
Philip, Anish (Project Member)
Madadi, Milad (Project Member)
Antikainen, Erik (Project Member)
Linjala, Juha (Project Member)
Sederholm, Linda (Project Member)
Jussila, Topias (Project Member)
Partanen, Olga (Project Member)
Koivisto, Iida (Project Member)
Francis, Malar (Project Member)
Lone, Umaid (Project Member)
Larkiala, Sauli (Project Member)
Pekkanen, Joona (Project Member)
Ghazy, Amr (Project Member)
Saltarelli, Lavinia (Project Member)
Kousar, Sajida (Project Member)
Tewari, Girish (Project Member)
Nemesszeghy, Miklós (Project Member)
Ghiyasi, Ramin (Project Member)

Department of Chemistry and Materials Science

18 results

Filter

2026
Amido-Amine Co(II) Precursor-Based Atomic/Molecular Layer Deposition Processes for Cobalt-Organic Thin Films and Their Thermal Conversion to CoO Thin Films
Jussila, T., Obenlüneschloß, J., Liu, J., Partanen, O., Vasala, S., Rogalla, D., Glatzel, P., Nolan, M., Devi, A. & Karppinen, M., 31 Jan 2026, (E-pub ahead of print) In: Advanced Materials Technologies. e02272.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
Area-Selective Atomic/Molecular Layer Deposition of Europium-Organic Thin Films on Graphene and Other 2D Materials for Photoluminescent Heterostructures
Emelianov, A. V., Mentel, K. K., Ghazy, A., Pekkanen, J., Wang, Y.-H., Johansson, A., Karppinen, M. & Pettersson, M., 31 Mar 2026, In: ACS Nano. 20, 12, p. 10062-10073 12 p.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
Atomic/molecular layer deposition of p-type conducting copper–sulfur–organic coordination polymer thin films for thermoelectric applications
Heikkinen, M., Francis, M. A., Meinander, K., Tewari, G. C., Nisula, M. & Karppinen, M., 11 Mar 2026, (E-pub ahead of print) In: Journal of Materials Chemistry A.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
Atomic Layer Deposition of Highly Conducting NiS₂ Thin Films from Elemental Sulfur
Linjala, J., Singh, Y., Tewari, G. C., Meinander, K., Tripathi, T. S. & Karppinen, M., 3 Feb 2026, In: Advanced Materials Interfaces. 13, 3, 10 p., e00987.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
2 Downloads (Pure)
Atomic layer deposition of zinc oxide films on lateral high-aspect-ratio test structures using diethylzinc and water as precursors
Haimi, E., Philip, A., Velasco, J. A., Gao, F., Karppinen, M. & Puurunen, R. L., 4 Mar 2026, In: Journal of Vacuum Science & Technology A. 44, 2, 9 p., 022410.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
3 Downloads (Pure)
Orthorhombic ZrO₂ thin films via atomic layer deposition from tris(dimethylamino)cyclopentadienyl zirconium and water
Ali, B., Ghiyasi, R., Pekkanen, J., Lastusaari, M. & Karppinen, M., Mar 2026, In: Materials Today Communications. 52, 8 p., 115134.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
Simultaneous H₂O:O₂ Co-Reactant Pulsing for Functional Property Control of Atomic Layer Deposited ZnO, TiO₂, and Al₂O₃ Thin Films
Ghiyasi, R. & Karppinen, M., 7 Apr 2026, In: Advanced Materials Interfaces. 13, 7, 11 p., e70445.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
2 Downloads (Pure)
2025
Area-selective atomic/molecular layer deposition via block copolymer approach: Zn-benzene dithiol deposition as a case study
Partanen, O., George, L., Philip, A., Kostiainen, M. A. & Karppinen, M., 3 Oct 2025, In: Journal of Vacuum Science & Technology A. 43, 6, 10 p., 062405.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
4 Downloads (Pure)
Atomic-layer-deposited CuxCryOz thin films: Optoelectronic properties and potential application as hole-selective contacts for c-Si solar cells
Bartholazzi, G., Jussila, T., Obenlüneschloß, J., Vähänissi, V., Devi, A., Savin, H., Karppinen, M., Macdonald, D. H. & Black, L. E., 28 Feb 2025, In: Applied Surface Science. 683, Part B, 10 p., 161793.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
1 Citation (Scopus)

55 Downloads (Pure)
Highly stable and conformal Ti-organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications
Philip, A., Lone, U., Partanen, O., Haimi, E. & Karppinen, M., 16 Jan 2025, In: Chemical Communications. 61, 5, p. 917-920 4 p.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
20 Downloads (Pure)
In situ growth of ultrathin Y₂O₃ capping layers for Eu-organic thin films via atomic/molecular layer deposition
Jussila, T., Pekkanen, J., Virta, A., Ghazy, A., Lastusaari, M. & Karppinen, M., 1 Mar 2025, In: Journal of Vacuum Science & Technology A. 43, 2, 9 p., 022406.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
2 Citations (Scopus)

35 Downloads (Pure)
Tunable Electrical and Optical Properties in Atomic Layer Deposited TiO₂:Pt Thin Films via Dynamic Metallic Nanoparticle Formation
Ghiyasi, R., Tewari, G. C. & Karppinen, M., 8 Sept 2025, In: Advanced Materials Interfaces. 12, 17, 7 p., e00594.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
1 Citation (Scopus)

18 Downloads (Pure)
2024
Block Copolymer Approach toward Selective Atomic-Layer Deposition of ZnO Films
Philip, A., Dong, Y., Vapaavuori, J. & Karppinen, M., Feb 2024, In: Advanced Engineering Materials. 26, 4, 8 p., 2300937.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
2 Citations (Scopus)

74 Downloads (Pure)
Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Films
Jussila, T., Philip, A., Rubio-Giménez, V., Eklund, K., Vasala, S., Glatzel, P., Lindén, J., Motohashi, T., Karttunen, A. J., Ameloot, R. & Karppinen, M., 9 Jul 2024, In: Chemistry of Materials. 36, 13, p. 6489–6503
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
6 Citations (Scopus)

98 Downloads (Pure)
Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition
Madadi, M., Heikkinen, M., Philip, A. & Karppinen, M., 26 Mar 2024, In: ACS Applied Electronic Materials. 6, 3, p. 1574–1580
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
19 Citations (Scopus)

197 Downloads (Pure)
Conformal Zn-Benzene Dithiol Thin Films for Temperature-Sensitive Electronics Grown via Industry-Feasible Atomic/Molecular Layer Deposition Technique
Philip, A., Jussila, T., Obenlüneschloß, J., Zanders, D., Preischel, F., Kinnunen, J., Devi, A. & Karppinen, M., 3 Oct 2024, In: Small. 20, 40, 10 p., 2402608.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
6 Citations (Scopus)

60 Downloads (Pure)
2023
Atomic/molecular layer deposition of europium-organic thin films on nanoplasmonic structures towards FRET-based applications
Ghazy, A., Ylönen, J., Subramaniyam, N. & Karppinen, M., 14 Oct 2023, In: Nanoscale. 15, 38, p. 15865-15870 6 p.
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
4 Citations (Scopus)

39 Downloads (Pure)
Excitation Wavelength Engineering through Organic Linker Choice in Luminescent Atomic/Molecular Layer Deposited Lanthanide-Organic Thin Films
Ghazy, A., Lastusaari, M. & Karppinen, M., 8 Aug 2023, In: Chemistry of Materials. 35, 15, p. 5988–5995
Research output: Contribution to journal › Article › Scientific › peer-review

Open Access
File
12 Citations (Web of Science)

81 Downloads (Pure)

Unique ALD/MLD-Enabled Material Functions

Research output

Search results

2026

2025

2024

2023