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Status	Finished
Effective start/end date	01/06/2016 → 14/11/2016

Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test
Rontu, V., Nolvi, A., Hokkanen, A., Haeggstrom, E., Kassamakov, I. & Franssila, S., Apr 2018, In: Materials Research Express. 5, 4, 10 p., 046411.
Research output: Contribution to journal › Article › Scientific › peer-review

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Mechanical properties of ultrathin ALD Al₂O₃ films
Rontu, V., Hokkanen, A. & Franssila, S., 2017.
Research output: Contribution to conference › Paper › Scientific

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