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Research Output

2018

Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

Rontu, V., Nolvi, A., Hokkanen, A., Haeggstrom, E., Kassamakov, I. & Franssila, S., Apr 2018, In : Materials Research Express. 5, 4, 10 p., 046411.

Research output: Contribution to journalArticleScientificpeer-review

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2017

Mechanical properties of ultrathin ALD Al2O3 films

Rontu, V., Hokkanen, A. & Franssila, S., 2017.

Research output: Contribution to conferencePaperScientific