Novel hybrid materials by ALD/MLD: from fundamentals towards applications

Inorganic-organic hybrid materials are composed of both inorganic and organic building blocks, and are anticipated to possess - once carefully glued together - a tailored combination of properties traditionally attributed to inorganics or organics separately. Here we will combine the state-of-the-art ALD (Atomic Layer Deposition) thin-film deposition technique of simple inorganic materials with the emerging MLD (Molecular Layer Deposition) technique for organic materials to grow novel inorganic-organic hybrid thin films in an atomic/molecular layer-by-layer manner. The combined ALD/MLD technique will be utilized to fabricate new component materials for flexible thermoelectric devices, solid-state Li-ion battery and thin-film MOFs (Metal Organic Frameworks).