New chemistries for resource efficient semiconductor manufacturing

Karppinen, Maarit (Principal investigator)
Philip, Anish (Project Member)
Ghiyasi, Ramin (Project Member)
Linjala, Juha (Project Member)
Israr, Fasiha (Project Member)

Department of Chemistry and Materials Science

1 Article

1 results

2025
Highly stable and conformal Ti-organic thin films from sustainable precursors via atomic/molecular layer deposition towards green energy applications
Philip, A., Lone, U., Partanen, O., Haimi, E. & Karppinen, M., 16 Jan 2025, In: Chemical Communications. 61, 5, p. 917-920 4 p.
Research output: Contribution to journal › Article › Scientific › peer-review

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