Mechald (Lipsanen)

  • Ali, Saima (Project Member)
  • Lipsanen, Harri (Principal investigator)
  • Sintonen, Sakari (Project Member)

Project Details

Short titleMechald (Lipsanen)
StatusFinished
Effective start/end date01/07/201131/03/2015

Research Output

Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films

Sippola, P., Pyymaki Perros, A., Ylivaara, O. M. E., Ronkainen, H., Julin, J., Liu, X., Sajavaara, T., Etula, J., Lipsanen, H. & Puurunen, R. L., 1 Sep 2018, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 5, 051508.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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