Research output per year
Research output per year
Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 01/07/2011 → 30/06/2014 |
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Research output
- 2 Article
-
Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
Ylivaara, O. M. E., Langner, A., Ek, S., Malm, J., Julin, J., Laitinen, M., Ali, S., Sintonen, S., Lipsanen, H., Sajavaara, T. & Puurunen, R. L., 1 Dec 2022, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 40, 6, 10 p., 062414.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile3 Citations (Scopus)103 Downloads (Pure) -
Comparison of mechanical properties and composition of magnetron sputter and plasma enhanced atomic layer deposition aluminum nitride films
Sippola, P., Pyymaki Perros, A., Ylivaara, O. M. E., Ronkainen, H., Julin, J., Liu, X., Sajavaara, T., Etula, J., Lipsanen, H. & Puurunen, R. L., 1 Sept 2018, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 5, 051508.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile9 Citations (Scopus)266 Downloads (Pure)