Femtosecond laser sulfur hyperdoped black silicon for infrared photonic applications

Savin, Hele (Principal investigator)
Yli-Koski, Marko (Project Member)
Liu, Xiaolong (Project Member)
Setälä, Olli (Project Member)
Radfar, Behrad (Project Member)

Department of Electronics and Nanoengineering

12 Article
6 Abstract
1 Review Article

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2024
Contactless analysis of surface passivation and charge transfer at the TiO ₂-Si interface
Khan, R., Liu, X., Vähänissi, V., Ali-Löytty, H., Pasanen, H. P., Savin, H. & Tkachenko, N. V., 3 May 2024, In: Physical Chemistry Chemical Physics. 26, 21, p. 15268-15276 9 p.
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1 Citation (Scopus)

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Effective carrier lifetime in ultrashort pulse laser hyperdoped silicon: sulfur concentration dependence and practical limitations
Schäfer, S., Liu, X., Mc Kearney, P., Paulus, S., Radfar, B., Vähänissi, V., Savin, H. & Kontermann, S., 2024, (E-pub ahead of print) In: PHYSICA STATUS SOLIDI A: APPLICATIONS AND MATERIALS SCIENCE. 2400132.
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1 Citation (Scopus)
Extended Infrared Absorption in Nanostructured Si Through Se Implantation and Flash Lamp Annealing
Radfar, B., Liu, X., Berencen, Y., Shaikh, M. S., Prucnal, S., Kentsch, U., Vähänissi, V., Zhou, S. & Savin, H., 2 Jun 2024, (E-pub ahead of print) In: Physica Status Solidi (A) Applications and Materials Science.
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1 Citation (Scopus)
Impact of post-ion implantation annealing on Se-hyperdoped Ge
Liu, X., Mc Kearney, P., Schäfer, S., Radfar, B., Berencen, Y., Kentsch, U., Vähänissi, V., Zhou, S., Kontermann, S. & Savin, H., 22 Jul 2024, In: Applied Physics Letters. 125, 4, 042102.
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Impact of Pulse Duration on the Properties of Laser Hyperdoped Black Silicon
Mc Kearney, P., Schäfer, S., Liu, X., Paulus, S., Lebershausen, I., Radfar, B., Vähänissi, V., Savin, H. & Kontermann, S., 27 Feb 2024, (E-pub ahead of print) In: Advanced Photonics Research.
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Wetting Properties of Black Silicon Layers Fabricated by Different Techniques
Ayvazyan, G., Hakhoyan, L., Vardanyan, A., Savin, H. & Liu, X., Aug 2024, In: Physica Status Solidi - Rapid Research Letters. 18, 8, 2400072.
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2023
Excellent Responsivity and Low Dark Current Obtained with Metal-Assisted Chemical Etched Si Photodiode
Chen, K., Setälä, O., Liu, X., Radfar, B., Pasanen, T., Serue, M., Heinonen, J., Savin, H. & Vähänissi, V., 1 Apr 2023, In: IEEE Sensors Journal. 23, 7, p. 6750-6756 7 p.
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2 Citations (Scopus)

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Optoelectronic properties of black silicon fabricated by femtosecond laser in ambient air: exploring a large parameter space
Radfar, B., Chen, K., Setälä, O., Vähänissi, V., Savin, H. & Liu, X., 1 Mar 2023, In: Optics Letters. 48, 5, p. 1224 - 1227 4 p.
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3 Citations (Scopus)

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Properties of Black Silicon Layers Fabricated by Different Techniques for Solar Cell Applications
Ayvazyan, G., Ayvazyan, K., Hakhoyan, L. & Liu, X., 15 Nov 2023, (E-pub ahead of print) In: Physica Status Solidi - Rapid Research Letters.
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2 Citations (Scopus)
2022
Millisecond-Level Minority Carrier Lifetime in Femtosecond Laser-Textured Black Silicon
Liu, X., Radfar, B., Chen, K., Pälikkö, E., Pasanen, T., Vähänissi, V. & Savin, H., 15 Aug 2022, In: IEEE Photonics Technology Letters. 34, 16, p. 870-873 4 p.
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9 Citations (Scopus)

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Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE and Fs-Laser Etching
Liu, X., Radfar, B., Chen, K., Setälä, O., Pasanen, T., Yli-Koski, M., Savin, H. & Vähänissi, V., Aug 2022, In: IEEE Transactions on Semiconductor Manufacturing. 35, 3, p. 504-510 7 p.
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17 Citations (Scopus)

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Tailoring Femtosecond-Laser Processed Black Silicon for Reduced Carrier Recombination Combined with >95% Above-Bandgap Absorption
Liu, X., Radfar, B., Chen, K., Pasanen, T., Vähänissi, V. & Savin, H., 17 Jan 2022, In: Advanced Photonics Research. 3, 4, 9 p., 2100234.
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Femtosecond laser sulfur hyperdoped black silicon for infrared photonic applications

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