Research output per year
Research output per year
Research output
- 6 Article
Search results
-
2023
Atomic Layer Deposition of Zinc Oxide on Mesoporous Zirconia Using Zinc(II) Acetylacetonate and Air
Yim, J., Haimi, E., Mäntymäki, M., Kärkäs, V., Bes, R., Arandia Gutierrez, A., Meinander, K., Brüner, P., Grehl, T., Gell, L., Viinikainen, T., Honkala, K., Huotari, S., Karinen, R., Putkonen, M. & Puurunen, R. L., 10 Oct 2023, In: Chemistry of Materials. 35, 19, p. 7915-7930 16 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile2 Downloads (Pure) -
Effect of atomic layer deposited zinc promoter on the activity of copper-on-zirconia catalysts in the hydrogenation of carbon dioxide to methanol
Arandia, A., Yim, J., Warraich, H., Leppäkangas, E., Bes, R., Lempelto, A., Gell, L., Jiang, H., Meinander, K., Viinikainen, T., Huotari, S., Honkala, K. & Puurunen, R. L., Feb 2023, In: Applied Catalysis B: Environmental. 321, 122046.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile10 Citations (Scopus)64 Downloads (Pure) -
Simulation of conformality of ALD growth inside lateral channels: comparison between a diffusion-reaction model and a ballistic transport-reaction model
Järvilehto, J., Velasco, J. A., Yim, J., Gonsalves, C. & Puurunen, R. L., 14 Sept 2023, In: Physical Chemistry Chemical Physics. 25, 34, p. 22952-22964 13 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile9 Downloads (Pure) -
2022
Conformality of atomic layer deposition in microchannels: impact of process parameters on the simulated thickness profile
Yim, J., Verkama, E., Velasco, J. A., Arts, K. & Puurunen, R. L., 11 Mar 2022, In: Physical Chemistry Chemical Physics. 24, 15, p. 8645-8660 16 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile10 Citations (Scopus)52 Downloads (Pure) -
2021
Saturation profile measurement of atomic layer deposited film by X-ray microanalysis on lateral high-aspect-ratio structure
Haimi, E., Ylivaara, O., Yim, J. & Puurunen, R., 1 Sept 2021, In: Applied Surface Science Advances. 5, 5 p., 100102.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile72 Downloads (Pure) -
2020
Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels
Yim, J., Ylivaara, O. M. E., Ylilammi, M., Korpelainen, V., Haimi, E., Verkama, E., Utriainen, M. & Puurunen, R. L., 28 Oct 2020, In: Physical chemistry chemical physics : PCCP. 22, 40, p. 23107-23120 14 p.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile23 Citations (Scopus)99 Downloads (Pure)