Traceable metrology of soft-X-ray to IR optical constants and nanofilms for advanced manufacturing

Project Details

Effective start/end date01/07/202130/06/2024

Collaborative partners

  • Aalto University (lead)
  • Carl Zeiss Industrielle Messtechnik GmbH (Joint applicant)
  • Carl Zeiss SMT GmbH (Joint applicant)
  • Forschungsverbund Berlin e.V. (Joint applicant)
  • Friedrich-Schiller-Universität Jena (Joint applicant)
  • Interuniversity Microelectronics Centre (Joint applicant)
  • JCMwave GmbH (Joint applicant)
  • Johannes Kepler University Linz (Joint applicant)
  • Physikalisch-Technische Bundesanstalt (Joint applicant)
  • Technische Universität Berlin (Joint applicant)
  • Delft University of Technology (Joint applicant)
  • RWTH Aachen University (Joint applicant)
  • Scientific and Technological Research Council of Türkiye (Joint applicant)
  • Danmarks Nationale Metrologiinstitut (Joint applicant)
  • Bundesanstalt für Materialforschung und -prüfung (Joint applicant)
  • Dutch Metrology Institute (Joint applicant)
  • European Association of National Metrology Institutes (Project partner)
  • Commissariat à l'Énergie Atomique et aux Énergies Alternatives
  • National Center for Scientific Research
  • University of Twente
  • Teknologian Tutkimuskeskus VTT Oy


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