An integrated pilot line for micro-fabricated medical devices

Project Details

Short titleInforMed
AcronymInForMed
StatusFinished
Effective start/end date01/06/201531/05/2019

Research Output

Mechanical properties and reliability of aluminum nitride thin films

Österlund, E., Kinnunen, J., Rontu, V., Torkkeli, A. & Paulasto-Kröckel, M., 25 Jan 2019, In : Journal of Alloys and Compounds. 772, p. 306-313 8 p.

Research output: Contribution to journalArticleScientificpeer-review

  • 6 Citations (Scopus)

    Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

    Rontu, V., Sippola, P., Broas, M., Ross, G., Lipsanen, H., Paulasto-Kröckel, M. & Franssila, S., Jan 2018, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 36, 2, 021508.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
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  • 9 Citations (Scopus)
    159 Downloads (Pure)