Zhen Zhu

Activities

  1. 2017
  2. Investigation of PEALD SiO2 thin films by rf-GDOES

    Zhen Zhu (Contributor), Chiara Modanese (Speaker), Perttu Sippola (Contributor), Marisa Di Sabatino (Contributor), Hele Savin (Contributor)
    25 May 2017

    Activity: Talk or presentation typesConference presentation

ID: 109868