Ville Rontu

  • Tietotie 3, 02150 Espoo

20122020

Research output per year

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Research Output

  • 7 Article
  • 4 Paper
  • 1 Conference contribution
  • 1 Master's thesis
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Article
2020

Scalable Superomniphobic Surfaces

Rontu, V., Jokinen, V. & Franssila, S., 2020, In : Journal of Microelectromechanical Systems. 29, 1, p. 54 - 61

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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38 Downloads (Pure)
2019

Mechanical properties and reliability of aluminum nitride thin films

Österlund, E., Kinnunen, J., Rontu, V., Torkkeli, A. & Paulasto-Kröckel, M., 25 Jan 2019, In : Journal of Alloys and Compounds. 772, p. 306-313 8 p.

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)
2018

Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

Rontu, V., Sippola, P., Broas, M., Ross, G., Lipsanen, H., Paulasto-Kröckel, M. & Franssila, S., Jan 2018, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 36, 2, 021508.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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9 Citations (Scopus)
158 Downloads (Pure)

Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

Rontu, V., Nolvi, A., Hokkanen, A., Haeggstrom, E., Kassamakov, I. & Franssila, S., Apr 2018, In : Materials Research Express. 5, 4, 10 p., 046411.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
123 Downloads (Pure)

Tribological properties of thin films made by atomic layer deposition sliding against silicon

Kilpi, L., Ylivaara, O. M. E., Vaajoki, A., Liu, X., Rontu, V., Sintonen, S., Haimi, E., Malm, J., Bosund, M., Tuominen, M., Sajavaara, T., Lipsanen, H., Hannula, S. P., Puurunen, R. L. & Ronkainen, H., 1 Jan 2018, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 1, 13 p., 01A122.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
4 Citations (Scopus)
140 Downloads (Pure)
2017

Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support

Rontu, V., Selent, A., Zhivonitko, V. V., Scotti, G., Koptyug, I. V., Telkki, V-V. & Franssila, S., 2017, In : CHEMISTRY: A EUROPEAN JOURNAL. 23, p. 16835 – 16842

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
4 Citations (Scopus)
107 Downloads (Pure)
2015

Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Berdova, M., Ylivaara, O. M. E., Rontu, V., Törmä, P. T., Puurunen, R. & Franssila, S., 2015, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 33, 1, 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
9 Citations (Scopus)
332 Downloads (Pure)