Ville Rontu

  • Tietotie 3, 02150 Espoo

20122020

Research output per year

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Research Output

  • 7 Article
  • 4 Paper
  • 1 Conference contribution
  • 1 Master's thesis

Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

Rontu, V., Sippola, P., Broas, M., Ross, G., Lipsanen, H., Paulasto-Kröckel, M. & Franssila, S., Jan 2018, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 36, 2, 021508.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
9 Citations (Scopus)
158 Downloads (Pure)

Atomic layer deposition of niobium nitride thin films

Rontu, V., 2014, Aalto University.

Research output: ThesisMaster's thesisTheses

Open Access

Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water

Berdova, M., Rontu, V., Sajavaara, T., Eskelinen, A-P. & Franssila, S., 12 May 2014.

Research output: Contribution to conferencePaperScientific

Characterization of nano-coated micro- and nanostructures by pushing

Liimatainen, V., Venäläinen, J., Koverola, M., Lyytinen, J., Rontu, V., Berdova, M., Koskinen, J., Franssila, S. & Zhou, Q., 2014, International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale,Taipei, Taiwan, October 27-31, 2014. p. 23-27 (International Conference on Manipulation Manufacturing and Measurement on the Nanoscale).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2 Citations (Scopus)

Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support

Rontu, V., Selent, A., Zhivonitko, V. V., Scotti, G., Koptyug, I. V., Telkki, V-V. & Franssila, S., 2017, In : CHEMISTRY: A EUROPEAN JOURNAL. 23, p. 16835 – 16842

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
4 Citations (Scopus)
107 Downloads (Pure)

Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

Rontu, V., Nolvi, A., Hokkanen, A., Haeggstrom, E., Kassamakov, I. & Franssila, S., Apr 2018, In : Materials Research Express. 5, 4, 10 p., 046411.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
123 Downloads (Pure)

Fabrication of superomniphobic nanoserif surfaces

Rontu, V., Hoshian, S., Shah, S., Jokinen, V. & Franssila, S., 21 Sep 2016.

Research output: Contribution to conferencePaperScientific

Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Berdova, M., Ylivaara, O. M. E., Rontu, V., Törmä, P. T., Puurunen, R. & Franssila, S., 2015, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 33, 1, 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
9 Citations (Scopus)
332 Downloads (Pure)

Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition

Rontu, V., Pitkänen, O., Heikkinen, J., Ge, Y., Kordas, K., Franssila, S. & Tuukkanen, S., 22 Jun 2015.

Research output: Contribution to conferencePaperScientific

Mechanical properties and reliability of aluminum nitride thin films

Österlund, E., Kinnunen, J., Rontu, V., Torkkeli, A. & Paulasto-Kröckel, M., 25 Jan 2019, In : Journal of Alloys and Compounds. 772, p. 306-313 8 p.

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Mechanical properties of ultrathin ALD Al2O3 films

Rontu, V., Hokkanen, A. & Franssila, S., 2017.

Research output: Contribution to conferencePaperScientific

Scalable Superomniphobic Surfaces

Rontu, V., Jokinen, V. & Franssila, S., 2020, In : Journal of Microelectromechanical Systems. 29, 1, p. 54 - 61

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
38 Downloads (Pure)

Tribological properties of thin films made by atomic layer deposition sliding against silicon

Kilpi, L., Ylivaara, O. M. E., Vaajoki, A., Liu, X., Rontu, V., Sintonen, S., Haimi, E., Malm, J., Bosund, M., Tuominen, M., Sajavaara, T., Lipsanen, H., Hannula, S. P., Puurunen, R. L. & Ronkainen, H., 1 Jan 2018, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 1, 13 p., 01A122.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
4 Citations (Scopus)
140 Downloads (Pure)