Ville Rontu

  • Tietotie 3, 02150 Espoo


Research output per year

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  • 1 Conference presentation

Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma as co-reactant

Ville Rontu (Speaker), Perttu Sippola (Speaker), Mikael Broas (Speaker), Timo Sajavaara (Speaker), Mervi Paulasto-Kröckel (Speaker), Harri Lipsanen (Speaker), Sami Franssila (Speaker)
15 Jul 201718 Jul 2017

Activity: Talk or presentation typesConference presentation