Ville Rontu

Operating Engineer

Activities

  1. 2017
  2. Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma as co-reactant

    Ville Rontu (Speaker), Perttu Sippola (Speaker), Mikael Broas (Speaker), Timo Sajavaara (Speaker), Mervi Paulasto-Kröckel (Speaker), Harri Lipsanen (Speaker), Sami Franssila (Speaker)
    15 Jul 201718 Jul 2017

    Activity: Talk or presentation typesConference presentation

ID: 108182