Ville Rontu

  • Tietotie 3, 02150 Espoo

20122020

Research output per year

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Research Output

  • 7 Article
  • 4 Paper
  • 1 Conference contribution
  • 1 Master's thesis

Scalable Superomniphobic Surfaces

Rontu, V., Jokinen, V. & Franssila, S., 2020, In : Journal of Microelectromechanical Systems. 29, 1, p. 54 - 61

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
  • 36 Downloads (Pure)

    Mechanical properties and reliability of aluminum nitride thin films

    Österlund, E., Kinnunen, J., Rontu, V., Torkkeli, A. & Paulasto-Kröckel, M., 25 Jan 2019, In : Journal of Alloys and Compounds. 772, p. 306-313 8 p.

    Research output: Contribution to journalArticleScientificpeer-review

  • 5 Citations (Scopus)

    Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

    Rontu, V., Sippola, P., Broas, M., Ross, G., Lipsanen, H., Paulasto-Kröckel, M. & Franssila, S., Jan 2018, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 36, 2, 021508.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
    File
  • 9 Citations (Scopus)
    156 Downloads (Pure)

    Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

    Rontu, V., Nolvi, A., Hokkanen, A., Haeggstrom, E., Kassamakov, I. & Franssila, S., Apr 2018, In : Materials Research Express. 5, 4, 10 p., 046411.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
    File
    123 Downloads (Pure)

    Tribological properties of thin films made by atomic layer deposition sliding against silicon

    Kilpi, L., Ylivaara, O. M. E., Vaajoki, A., Liu, X., Rontu, V., Sintonen, S., Haimi, E., Malm, J., Bosund, M., Tuominen, M., Sajavaara, T., Lipsanen, H., Hannula, S. P., Puurunen, R. L. & Ronkainen, H., 1 Jan 2018, In : Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 36, 1, 13 p., 01A122.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
    File
  • 4 Citations (Scopus)
    140 Downloads (Pure)

    Projects

    Silicon mushrooms: microengineered liquid repellency

    Franssila, S., Isoaho, N., Hoshian, S., Rontu, V., Jokinen, V., Rantataro, J., Mirmohammadi, S. & Herrala, R.

    01/09/201631/08/2020

    Project: Academy of Finland: Other research funding

    Superwindows - a new look at the world through supertransparent windows

    Franssila, S., Hoshian, S. & Rontu, V.

    01/06/201631/05/2017

    Project: Business Finland: Other research funding

    Programmable wetting - Ohjelmoitava vettyminen

    Franssila, S., Ge, Y., Hoshian, S. & Rontu, V.

    01/09/201230/09/2016

    Project: Academy of Finland: Other research funding

    Activities

    • 1 Conference presentation

    Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma as co-reactant

    Ville Rontu (Speaker), Perttu Sippola (Speaker), Mikael Broas (Speaker), Timo Sajavaara (Speaker), Mervi Paulasto-Kröckel (Speaker), Harri Lipsanen (Speaker), Sami Franssila (Speaker)
    15 Jul 201718 Jul 2017

    Activity: Talk or presentation typesConference presentation