Ville Miikkulainen Aalto University/Mikko Raskinen
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  • 2022

    An Atomic Layer Deposition Apparatus

    Aminoff, H., Soininen, P., Soininen, P. J. & Miikkulainen, V., 18 Aug 2022, IPC No. C23C 16/ 455 A I, Patent No. US2022259733, Priority date 26 Jun 2020, Priority No. WO2020FI50463

    Research output: Patent

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