Research output per year

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Personal profile

Education/Academic qualification

Doctor of Science (Technology), Electrical Engineering

Master of Science (Technology), Materials Technology

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Research Output

Open Access
  • Inorganic particulate matter in the lung tissue of idiopathic pulmonary fibrosis patients reflects population density and fine particle levels

    Mäkelä, K., Ollila, H., Sutinen, E., Vuorinen, V., Peltola, E., Kaarteenaho, R. & Myllärniemi, M., 1 Jun 2019, In : ANNALS OF DIAGNOSTIC PATHOLOGY. 40, p. 136-142 7 p.

    Research output: Contribution to journalArticleScientificpeer-review

    Open Access
  • 2 Citations (Scopus)
    101 Downloads (Pure)

    In-situ annealing characterization of atomic-layer-deposited Al2O3 in N2 , H2 and vacuum atmospheres

    Broas, M., Lemettinen, J., Sajavaara, T., Tilli, M., Vuorinen, V., Suihkonen, S. & Paulasto-Kröckel, M., 31 Jul 2019, In : Thin Solid Films. 682, p. 147-155 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  • The Role of Ultrafine Crystalline Behavior and Trace Impurities in Copper on Intermetallic Void Formation

    Ross, G., Malmberg, P., Vuorinen, V. & Paulasto-Kröckel, M., 2019, In : ACS Applied Electronic Materials. 1, 1, p. 88-95 8 p.

    Research output: Contribution to journalArticleScientificpeer-review

  • Process Integration and Reliability of Wafer Level SLID Bonding for Poly-Si TSV capped MEMS

    Vuorinen, V., Ross, G., Viljanen, H., Decker, J. & Paulasto-Krockel, M., 26 Nov 2018, Proceedings of the 2018 7th Electronic System-Integration Technology Conference, ESTC 2018. IEEE, 6 p. 8546398

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Open Access
  • 182 Downloads (Pure)



    • 2 Conference presentation
    • 1 Visit abroad

    Low Temperature Wafer-Level Cu-In-Sn Solid Liquid Interdiffusion Bonding For Low Stress Applications

    Glenn Ross (Speaker), Vesa Vuorinen (Contributor), Joseph Hotchkiss (Contributor), Jani Kaaos (Contributor), Mervi Paulasto-Kröckel (Contributor)
    3 Dec 2019

    Activity: Talk or presentation typesConference presentation

    High-Resolution inspection for bonding voids in Solid-Liquid-Interdiffusion (SLID) bond interfaces by Acoustic GHz-Microscopy

    Sebastian Brand (Speaker), Michael Kögel (Contributor), Glenn Ross (Contributor), Vesa Vuorinen (Contributor), Mervi Paulasto-Kröckel (Contributor), Matthias Petzold (Contributor)
    27 Nov 201729 Nov 2017

    Activity: Talk or presentation typesConference presentation

    Foreign Organisation

    Vesa Vuorinen (Visiting researcher)
    26 May 201628 May 2016

    Activity: Visiting an external institution typesVisit abroad