Engineering & Materials Science
Metallorganic vapor phase epitaxy
Silicon
Topography
Gallium nitride
Synchrotrons
X rays
Synchrotron radiation
Impurities
X ray films
Substrates
Diffraction patterns
Diffraction
Crystals
Autoclaves
Spectroscopy
Epitaxial growth
Photoluminescence
Inductively coupled plasma
Laser ablation
Carrier concentration
Ions
Fourier transforms
Experiments
Infrared radiation
Vapor phase epitaxy
Optical properties
Strain measurement
Optoelectronic devices
Stress relief
Structural properties
Electric properties
Physics & Astronomy
topography
insulators
silicon
gallium nitrides
SOI (semiconductors)
synchrotrons
metalorganic chemical vapor deposition
x rays
impurities
autoclaves
wafers
synchrotron radiation
mass spectroscopy
crystals
epitaxy
diffraction
diffraction patterns
tensile tests
tensile stress
laser ablation
boules
photoluminescence
ions
transmission electron microscopy
gradients
strain measurement
chemical analysis
characterization
profiles
Chemical Compounds
gallium nitride
Metallorganic vapor phase epitaxy
Silicon
Impurities
Substrates
Autoclaves
Spectroscopy
Synchrotron radiation
aluminum gallium nitride
Epitaxial growth
X rays
Photoluminescence
Topography
Inductively coupled plasma
Laser ablation
Carrier concentration
Ions
Fourier transforms
Infrared radiation
Vapor phase epitaxy
Optical properties
Strain measurement
Optoelectronic devices
Stress relief
Structural properties
Electric properties