Teppo Huhtio

  • Otakaari 1

20102017

Research output per year

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Research Output

  • 28 Article
  • 12 Conference contribution
  • 1 Working paper
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Working paper
2011

Properties of AlN Film Grown by Plasma Enhanced Atomic Layer Deposition

Bosund, M., Putkonen, M., Sajavaara, T., Laitinen, M., Huhtio, T., Airaksinen, V-M. & Lipsanen, H., 2011.

Research output: Working paperProfessional

35 Citations (Scopus)