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Suresh Kondati Natarajan

  • Phone+358503233746
20192020

Research output per year

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Research Output

Mechanism of Thermal Atomic Layer Etch of W Metal Using Sequential Oxidation and Chlorination: A First-Principles Study

Kondati Natarajan, S., Nolan, M., Theofanis, P., Mokhtarzadeh, C. & Clendenning, S. B., 12 Aug 2020, In : ACS applied materials & interfaces. 12, 32, p. 36670-36680 11 p.

Research output: Contribution to journalArticleScientificpeer-review

  • Self-Limiting Temperature Window for Thermal Atomic Layer Etching of HfO2 and ZrO2 Based on the Atomic-Scale Mechanism

    Mullins, R., Natarajan, S. K., Elliott, S. D. & Nolan, M., 28 Apr 2020, In : Chemistry of Materials. 32, 8, p. 3414-3426 13 p.

    Research output: Contribution to journalArticleScientificpeer-review

    The role of Ru passivation and doping on the barrier and seed layer properties of Ru-modified TaN for copper interconnects

    Kondati Natarajan, S., Nies, C. L. & Nolan, M., 14 Apr 2020, In : Journal of Chemical Physics. 152, 14, 13 p., 144701.

    Research output: Contribution to journalArticleScientificpeer-review

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