Sami Franssila

View Scopus Profile

Micronova, Tietotie 3, huone 2169PL 13500

Research activity per year

If you made any changes in Pure these will be visible here soon.

4 results

Filter

2017
Etching Techniques for Superhydrophobic Surface Fabrication
Franssila, S., 2017, Non-wettable Surfaces: Theory, Preparation, and Applications. 5 ed. Royal Society of Chemistry, Vol. 2017-January. p. 117-144 28 p. (RSC Soft Matter; vol. 2017-January, no. 5).
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review
2015

Deep Reactive Ion Etching
Lärmer, F., Franssila, S., Sainiemi, L. & Kolari, K., 2015, Handbook of silicon based MEMS materials and technologies, 2nd edition. Franssila, S., Tilli, M., Lindroos, V., Motooka, T., Airaksinen, V-M. & Paulasto-Krockel, M. (eds.). Lontoo: Elsevier, p. 444-469
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

37 Citations (Scopus)
MEMS lithography
Franssila, S. & Tuomikoski, S., 2015, Handbook of silicon based MEMS materials and technologies, 2nd edition. Franssila, S., Tilli, M., Lindroos, V., Motooka, T., Airaksinen, V-M. & Paulasto-Krockel, M. (eds.). Lontoo: Elsevier, p. 333-348
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review
Microfluidics and BioMEMS in silicon
Franssila, S., Davis, C., LeVasseur, M. K., Cao, Z. & Yobas, L., 2015, Handbook of silicon based MEMS materials and technologies, 2nd edition. Franssila, S., Tilli, M., Lindroos, V., Motooka, T., Airaksinen, V-M. & Paulasto-Krockel, M. (eds.). Lontoo: Elsevier, p. 565-581
Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

Sami Franssila

Research output

Search results

Etching Techniques for Superhydrophobic Surface Fabrication

Deep Reactive Ion Etching

MEMS lithography

Microfluidics and BioMEMS in silicon