• Micronova, Tietotie 3, huone 2169PL 13500

1990 …2020

Research output per year

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Research Output

2020

Scalable Superomniphobic Surfaces

Rontu, V., Jokinen, V. & Franssila, S., 2020, In : Journal of Microelectromechanical Systems. 29, 1, p. 54 - 61

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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37 Downloads (Pure)

Tunable and Magnetic Thiol-ene Micropillar Arrays

Al-Azawi, A., Cenev, Z., Tupasela, T., Peng, B., Ikkala, O., Zhou, Q., Jokinen, V., Franssila, S. & Ras, R., Jan 2020, In : Macromolecular Rapid Communications. 41, 2, p. 1-6 6 p., 1900522.

Research output: Contribution to journalArticleScientificpeer-review

2019

Disposable Microfluidic Sensor Based on Nanocellulose for Glucose Detection

Uddin, K. M. A., Jokinen, V., Ahangiri, F., Franssila, S., Rojas, O. J. & Tuukkanen, S., Feb 2019, In : Global Challenges - An Innovative Journal for Tackling Humanity's Global Challenges. 3, 2, 6 p., 1800079.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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37 Downloads (Pure)

Fabrication of micro- and nanopillars from pyrolytic carbon and tetrahedral amorphous carbon

Heikkinen, J. J., Peltola, E., Wester, N., Koskinen, J., Laurila, T., Franssila, S. & Jokinen, V., 1 Aug 2019, In : MICROMACHINES. 10, 8, 22 p., 510.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
1 Citation (Scopus)
85 Downloads (Pure)

Practical realization of a sub-λ/2 acoustic jet

Veira Canle, D., Kekkonen, T., Mäkinen, J., Puranen, T., Nieminen, H. J., Kuronen, A., Franssila, S., Kotiaho, T., Salmi, A. & Hæggström, E., 1 Dec 2019, In : Scientific Reports. 9, 1, 6 p., 5189.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
5 Citations (Scopus)
122 Downloads (Pure)
2018

A microfluidic oxygen sink to create a targeted cellular hypoxic microenvironment under ambient atmospheric conditions

Barmaki, S., Jokinen, V., Obermaier, D., Blokhina, D., Korhonen, M., Ras, R. H. A., Vuola, J., Franssila, S. & Kankuri, E., Jun 2018, In : Acta Biomaterialia. 73, p. 167-179

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
1 Citation (Scopus)
1 Downloads (Pure)

Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

Rontu, V., Sippola, P., Broas, M., Ross, G., Lipsanen, H., Paulasto-Kröckel, M. & Franssila, S., Jan 2018, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 36, 2, 021508.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
9 Citations (Scopus)
156 Downloads (Pure)
Open Access
File
5 Citations (Scopus)
151 Downloads (Pure)

Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

Rontu, V., Nolvi, A., Hokkanen, A., Haeggstrom, E., Kassamakov, I. & Franssila, S., Apr 2018, In : Materials Research Express. 5, 4, 10 p., 046411.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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123 Downloads (Pure)

Plasma etched carbon microelectrode arrays for bioelectrical measurements

Heikkinen, J. J., Kaarela, T., Ludwig, A., Sukhanova, T., Khakipoor, S., Kim, S. I., Han, J. G., Huttunen, H. J., Rivera, C., Lauri, S. E., Taira, T., Jokinen, V. & Franssila, S., 1 Nov 2018, In : Diamond and Related Materials. 90, p. 126-134 9 p.

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)

Platinum Recovery from Industrial Process Solutions by Electrodeposition-Redox Replacement

Halli, P., Heikkinen, J. J., Elomaa, H., Wilson, B. P., Jokinen, V., Yliniemi, K., Franssila, S. & Lundström, M., 5 Nov 2018, In : ACS Sustainable Chemistry and Engineering. 6, 11, p. 14631-14640 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
6 Citations (Scopus)
130 Downloads (Pure)

Sacrificial layer technique for releasing metallized multilayer SU-8 devices

Tatikonda, A., Jokinen, V. P., Evard, H. & Franssila, S., 19 Dec 2018, In : MICROMACHINES. 9, 12, 673.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
1 Citation (Scopus)
123 Downloads (Pure)

Superhydrophobic blood-repellent surfaces

Jokinen, V., Kankuri, E., Hoshian, S., Franssila, S. & Ras, R., Jun 2018, In : Advanced Materials. 30, 24, 10 p., 1705104.

Research output: Contribution to journalReview ArticleScientificpeer-review

Open Access
File
54 Citations (Scopus)
213 Downloads (Pure)
2017

Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support

Rontu, V., Selent, A., Zhivonitko, V. V., Scotti, G., Koptyug, I. V., Telkki, V-V. & Franssila, S., 2017, In : CHEMISTRY: A EUROPEAN JOURNAL. 23, p. 16835 – 16842

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
4 Citations (Scopus)
107 Downloads (Pure)

Electrochemical Characterization of the Microfabricated Electrochemical Sensor-Array System

Pitman, K., Raud, M., Scotti, G., Jokinen, V., Franssila, S., Nerut, J., Lust, E. & Kikas, T., Jan 2017, In : ELECTROANALYSIS. 29, 1, p. 249-258 11 p.

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)

Electrooxidation of hexacyanoferrate(II) anions and electroreduction of oxygen in the microfabricated electrochemical sensor-array system

Pitman, K., Nerut, J., Lust, E., Franssila, S., Raud, M. & Kikas, T., 2017, Selected Proceedings from the 231st ECS Meeting New Orleans, LA - Spring 2017. The Electrochemical Society, p. 1771-1782 12 p. (ECS Transactions; vol. 77, no. 11).

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2 Citations (Scopus)

Etching Techniques for Superhydrophobic Surface Fabrication

Franssila, S., 2017, Non-wettable Surfaces: Theory, Preparation, and Applications. 5 ed. Royal Society of Chemistry, Vol. 2017-January. p. 117-144 28 p. (RSC Soft Matter; vol. 2017-January, no. 5).

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Friction and Wetting Transitions of Magnetic Droplets on Micropillared Superhydrophobic Surfaces

Al-Azawi, A., Latikka, M., Jokinen, V., Franssila, S. & Ras, R. H. A., 11 Oct 2017, In : Small. 13, 38, p. 1-7 1700860.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
10 Citations (Scopus)
133 Downloads (Pure)

Mechanical properties of ultrathin ALD Al2O3 films

Rontu, V., Hokkanen, A. & Franssila, S., 2017.

Research output: Contribution to conferencePaperScientific

SU-8 Based Pyrolytic Carbon for the Electrochemical Detection of Dopamine

Peltola, E., Heikkinen, J. J., Sovanto, K., Sainio, S., Aarva, A., Franssila, S., Jokinen, V. & Laurila, T., 1 Nov 2017, In : JOURNAL OF MATERIALS CHEMISTRY. B. 5, 45, p. 9033-9044

Research output: Contribution to journalArticleScientificpeer-review

Thiol-ene micropillar array electrospray ionization platform for zeptomole level bioanalysis

Lipponen, K., Tähkä, S., Sikanen, T., Jokinen, V., Tatikonda, A., Franssila, S., Kostiainen, R. & Kotiaho, T., 21 Jul 2017, In : Analyst. 142, 14, p. 2552-2557 6 p.

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)

Water and Blood Repellent Flexible Tubes

Hoshian, S., Kankuri, E., Ras, R. H. A., Franssila, S. & Jokinen, V., 1 Dec 2017, In : Scientific Reports. 7, 1, p. 1-8 16019.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
15 Citations (Scopus)
116 Downloads (Pure)
2016

Axonal Kainate Receptors Modulate the Strength of Efferent Connectivity by Regulating Presynaptic Differentiation

Sakha, P., Vesikansa, A., Orav, E., Heikkinen, J., Kukko-Lukjanov, T-K., Shintyapina, A., Franssila, S., Jokinen, V., Huttunen, H. J. & Lauri, S. E., 20 Jan 2016, In : FRONTIERS IN CELLULAR NEUROSCIENCE. 10, 13 p., 3.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
7 Citations (Scopus)
121 Downloads (Pure)

Cellulose Nanofibril Film as a Piezoelectric Sensor Material

Rajala, S., Siponkoski, T., Sarlin, E., Mettänen, M., Vuoriluoto, M., Pammo, A., Juuti, J., Rojas, O. J., Franssila, S. & Tuukkanen, S., 22 Jun 2016, In : ACS Applied Materials and Interfaces. 8, 24, p. 15607-15614 8 p.

Research output: Contribution to journalArticleScientificpeer-review

74 Citations (Scopus)

Fabrication of superomniphobic nanoserif surfaces

Rontu, V., Hoshian, S., Shah, S., Jokinen, V. & Franssila, S., 21 Sep 2016.

Research output: Contribution to conferencePaperScientific

Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition

Berdova, M., Liu, X., Wiemer, C., Lamperti, A., Tallarida, G., Cianci, E., Fanciulli, M. & Franssila, S., 1 Sep 2016, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 34, 5, 051510.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
11 Citations (Scopus)
271 Downloads (Pure)

Inkjet printed silver electrodes on macroporous paper for a paper-based isoelectric focusing device

Henriques Gaspar, C., Sikanen, T., Franssila, S. & Jokinen, V., 1 Nov 2016, In : BIOMICROFLUIDICS. 10, 6, 064120.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
8 Citations (Scopus)
149 Downloads (Pure)

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

Hoshian, S., Henriques Gaspar, C., Vasara, T., Jahangiri, F., Jokinen, V. & Franssila, S., 8 Dec 2016, In : MICROMACHINES. 7, 12, p. 1-9 9 p., 222.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
2 Citations (Scopus)
481 Downloads (Pure)

Novel nanostructure replication process for robust superhydrophobic surfaces

Hoshian, S., Jokinen, V. & Franssila, S., 26 Feb 2016, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, p. 547-549 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

2 Citations (Scopus)

Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications

Berdova, M., Wiemer, C., Lamperti, A., Tallarida, G., Cianci, E., Lamagna, L., Losa, S., Rossini, S., Somaschini, R., Gioveni, S., Fanciulli, M. & Franssila, S., 15 Apr 2016, In : Applied Surface Science. 368, p. 470-476 7 p.

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)

Robust hybrid elastomer/metal-oxide superhydrophobic surfaces

Hoshian, S., Jokinen, V. & Franssila, S., 2016, In : Soft Matter. 12, 31, p. 6526-6535 10 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
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402 Downloads (Pure)

UV-ozone patterning of micro-nano fibrillated cellulose (MNFC) with alkylsilane self-assembled monolayers

Kämäräinen, T., Arcot, L. R., Johansson, L-S., Campbell, J., Tammelin, T., Franssila, S., Laine, J. & Rojas, O. J., 2016, In : Cellulose. 23, 3, p. 1847-1857 11 p.

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)
2015

Amplified and Localized Photoswitching of TiO2 by Micro- and Nanostructuring

Hoshian, S., Jokinen, V., Hjort, K., Ras, R. H. A. & Franssila, S., 22 Jul 2015, In : ACS Applied Materials and Interfaces. 7, 28, p. 15593-15599 7 p.

Research output: Contribution to journalArticleScientificpeer-review

23 Citations (Scopus)

Deep Reactive Ion Etching

Lärmer, F., Franssila, S., Sainiemi, L. & Kolari, K., 2015, Handbook of silicon based MEMS materials and technologies, 2nd edition. Franssila, S., Tilli, M., Lindroos, V., Motooka, T., Airaksinen, V-M. & Paulasto-Krockel, M. (eds.). Lontoo: Elsevier, p. 444-469

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

10 Citations (Scopus)

Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Berdova, M., Ylivaara, O. M. E., Rontu, V., Törmä, P. T., Puurunen, R. & Franssila, S., 2015, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 33, 1, 5 p.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
9 Citations (Scopus)
332 Downloads (Pure)

Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition

Rontu, V., Pitkänen, O., Heikkinen, J., Ge, Y., Kordas, K., Franssila, S. & Tuukkanen, S., 22 Jun 2015.

Research output: Contribution to conferencePaperScientific

Handbook of silicon based MEMS materials and technologies

Tilli, M., Motooka, T., Airaksinen, V-M., Franssila, S., Paulasto-Kröckel, M. & Lindroos, V., 2015, 2nd edition ed. London: Elsevier. 787 p.

Research output: Book/ReportBookProfessional

Handbook of Silicon Based MEMS Materials and Technologies: Second Edition

Tilli, M., Motooka, T., Airaksinen, V. M., Franssila, S., Paulasto-Kröckel, M. & Lindroos, V., 1 Jan 2015, Elsevier Inc. 787 p.

Research output: Book/ReportAnthologyScientificpeer-review

45 Citations (Scopus)

Interfacing microchip isoelectric focusing with on-chip electrospray ionization mass spectrometry

Nordman, N., Lauren, S., Franssila, S., Kotiaho, T., Kostiainen, R. & Sikanen, T., 2015, In : JOURNAL OF CHROMATOGRAPHY A. 1398, Jun 12 2015, p. 121-126

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)

Making porous conductive carbon films with unbalanced magnetron sputtering

Kim, S. II., Sahu, B. B., Weon, B. M., Han, J. G., Koskinen, J. & Franssila, S., 2015, In : Japanese Journal of Applied Physics. 54, 1, p. 1-4 4 p.

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)

MEMS lithography

Franssila, S. & Tuomikoski, S., 2015, Handbook of silicon based MEMS materials and technologies, 2nd edition. Franssila, S., Tilli, M., Lindroos, V., Motooka, T., Airaksinen, V-M. & Paulasto-Krockel, M. (eds.). Lontoo: Elsevier, p. 333-348

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Microfluidics and BioMEMS in silicon

Franssila, S., Davis, C., LeVasseur, M. K., Cao, Z. & Yobas, L., 2015, Handbook of silicon based MEMS materials and technologies, 2nd edition. Franssila, S., Tilli, M., Lindroos, V., Motooka, T., Airaksinen, V-M. & Paulasto-Krockel, M. (eds.). Lontoo: Elsevier, p. 565-581

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Microfluidics with on-line mass spectrometric methods for investigation of reaction mechanisms

Nilsson, S. M. E., Aumüller, I., Kiriazis, A., Boije af Gennäs, G., Haapala, M., Scotti, G., Franssila, S., Yli-Kauhaluoma, J. & Kotiaho, T., 2015, MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences. p. 2116-2117 2 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Piezoelectric sensitivity measurement for nanofibrillated cellulose film sensors

Rajala, S., Vuoriluoto, M., Rojas, O., Franssila, S. & Tuukkanen, S., 2015, IMEKO 2015 conference, XXI World Congress IMEKO, ISWFPC 2015. 18th International Symposium on Wood, Fiber and Pulping Chemistry, Tullin, September 07-08, 2015.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Piezoelectric sensitivity measurements of cellulose nanofibril sensors

Rajala, S., Vuoriluoto, M., Rojas, O. J., Franssila, S. & Tuukkanen, S., 2015, XXI IMEKO World Congress "Measurement in Research and Industry".

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

6 Citations (Scopus)

Robust Superhydrophobic Silicon Without a Low Surface-Energy Hydrophobic Coating

Hoshian, S., Jokinen, V., Somerkivi, V., Arcot Raghupathi, L. & Franssila, S., 2015, In : ACS Applied Materials and Interfaces. 7, 1, p. 941-949

Research output: Contribution to journalArticleScientificpeer-review

56 Citations (Scopus)

Shape-Anchored Porous Polymer Monoliths for Integrated Online Solid-Phase Extraction-Microchip Electrophoresis-Electrospray Ionization Mass Spectrometry

Nordman, N., Barrios-Lopez, B., Laurén, S., Suvanto, P., Kotiaho, T., Franssila, S., Kostiainen, R. & Sikanen, T., 2015, In : Electrophoresis. 36, 3, p. 428-432

Research output: Contribution to journalArticleScientificpeer-review

16 Citations (Scopus)

Silicon Micropillar Electrospray Ionization Chip Platform for Biomolecular Analysis in the Aqueous Phase

Hirvonen, S., Lipponen, K., Jokinen, V., Franssila, S., Kostiainen, R. & Kotiaho, T., 2015, MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences. p. 1752-1754 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

1 Citation (Scopus)
2014

Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres

Lyytinen, J., Berdova, M., Franssila, S. & Koskinen, J., 2014, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 32, 1, p. 1-5 5 p., 01A102.

Research output: Contribution to journalArticleScientificpeer-review

Open Access
File
7 Citations (Scopus)
324 Downloads (Pure)

A micro heat exchanger microfabricated from bulk aluminium

Scotti, G. & Franssila, S., 2014, In : Journal of Physics: Conference Series. 557, 1, 012069.

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)