Riikka Puurunen

Professor (Associate Professor)

Research outputs

  1. 2005
  2. Published

    Surface preparation techniques for high-k deposition on Ge substrates

    Van Elshocht, S., Delabie, A., Brijs, B., Caymax, M., Conard, T., Onsia, B., Puurunen, R., Richard, O., Van Steenbergen, J., Zhao, C. & 2 othersMeuris, M. & Heyns, M. M., 2005, Ultra Clean Processing of Silicon Surfaces VII, UCPSS 2004 - Proceedings of the 7th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS). Trans Tech Publications Ltd., Vol. 103-104. p. 31-34 4 p. (Solid State Phenomena; vol. 103-104).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  3. 2004
  4. Published

    Island growth as a growth mode in atomic layer deposition: A phenomenological model

    Puurunen, R. L. & Vandervorst, W., 15 Dec 2004, In : Journal of Applied Physics. 96, 12, p. 7686-7695 10 p., 10.

    Research output: Contribution to journalArticleScientificpeer-review

  5. Published

    Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy

    Puurunen, R. L., Vandervorst, W., Besling, W. F. A., Richard, O., Bender, H., Conard, T., Zhao, C., Delabie, A., Caymax, M., De Gendt, S. & 10 othersHeyns, M., Viitanen, M. M., De Ridder, M., Brongersma, H. H., Tamminga, Y., Dao, T., De Win, T., Verheijen, M., Kaiser, M. & Tuominen, M., 1 Nov 2004, In : Journal of Applied Physics. 96, 9, p. 4878-4889 12 p.

    Research output: Contribution to journalArticleScientificpeer-review

  6. Published
  7. Published

    Random deposition as a growth mode in atomic layer deposition

    Puurunen, R. L., Jun 2004, In : Chemical Vapor Deposition. 10, 3, p. 159-170 12 p.

    Research output: Contribution to journalArticleScientificpeer-review

  8. Published

    Analysis of hydroxyl group controlled atomic layer deposition of hafnium dioxide from hafnium tetrachloride and water

    Puurunen, R. L., 1 May 2004, In : Journal of Applied Physics. 95, 9, p. 4777-4786 10 p.

    Research output: Contribution to journalArticleScientificpeer-review

  9. 2003
  10. Published

    Chromium(III) supported on aluminum-nitride-surfaced alumina: characteristics and dehydrogenation activity

    Puurunen, R., Airaksinen, S. & Krause, O., 2003, In : Journal of Catalysis. 213, p. 281-290

    Research output: Contribution to journalArticleScientificpeer-review

  11. Published

    Growth Per Cycle in Atomic Layer Deposition: A Theoretical Model

    Puurunen, R., 2003, In : Chemical Vapor Deposition. 9, 5, p. 249-257

    Research output: Contribution to journalArticleScientificpeer-review

  12. Published

    Growth Per Cycle in Atomic Layer Deposition: Real Application Examples of a Theoretical Model

    Puurunen, R., 2003, In : Chemical Vapor Deposition. 9, 6, p. 327-332

    Research output: Contribution to journalArticleScientificpeer-review

  13. Published

    Implementation of high-k gate dielectrics - A status update

    De Gendt, S., Chen, J., Carter, R., Cartier, E., Caymax, M., Claes, M., Conard, T., Delabie, A., Deweerd, W., Kaushik, V. & 16 othersKerber, A., Kubicek, S., Maes, J. W., Niwa, M., Pantisano, L., Puurunen, R., Ragnarsson, L., Schram, T., Shimamoto, Y., Tsai, W., Rohr, E., Van Elshocht, S., Witters, T., Young, E., Zhao, C. & Heyns, M., 2003, Extended Abstracts of International Workshop on Gate Insulator, IWGI 2003. Institute of Electrical and Electronics Engineers, p. 10-14 5 p. 1252497

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  14. Published

    Scaling of Hf-based gate dielectrics - Integration with polysilicon gates

    De Gendt, S., Caymax, M., Chen, J., Claes, M., Conard, T., Delabie, A., Deweerd, W., Kaushik, V., Kerber, A., Kubicek, S. & 14 othersNiwa, M., Pantisano, L., Puurunen, R., Ragnarsson, L., Schram, T., Shimamoto, Y., Tsai, W., Rohr, E., Van Elshocht, S., Vandervorst, W., Witters, T., Young, E., Zhao, C. & Heyns, M., 2003, Physics and Technology of High-k Gate Dielectrics II : proceedings of the Second International Symposium on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues : held in Orlando, Florida, October 12-16, 2003 . Kar, S., Misra, D., Houssa, M., Landheer, D. & et al, A. (eds.). p. 267-275 9 p.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  15. 2002
  16. Published

    Cobalt(III)acetylacetonate chemisorbed on aluminum-nitride-modified silica: characteristics and hydroformylation activity

    Puurunen, R., Zeelie, T. & Krause, O., 2002, In : Catalysis Letters. 83, 1-2, p. 27-32

    Research output: Contribution to journalArticleScientificpeer-review

  17. Published

    Growth of Aluminum Nitride on Porous Alumina and Silica through Separate Saturated Gas-Solid Reactions of Trimethylaluminum and Ammonia

    Puurunen, R., Root, A., Sarv, P., Viitanen, M., Brongersma, H., Lindblad, M. & Krause, O., 2002, In : Chemistry of Materials. 14, p. 720-729

    Research output: Contribution to journalArticleScientificpeer-review

  18. Published

    Preparation of silica-supported cobalt catalysts through chemisorption of cobalt(II) and cobalt(III) acetylacetonate

    Rautiainen, A., Lindblad, M., Backman, L. & Puurunen, R., 2002, In : Physical Chemistry Chemical Physics. 4, p. 2466-2472

    Research output: Contribution to journalArticleScientificpeer-review

  19. Published

    Spectroscopic Study on the Irreversible Deactivation of Chromia/Alumina Dehydrogenation Catalysts

    Puurunen, R. & Weckhuysen, B., 2002, In : Journal of Catalysis. 210, p. 418-430

    Research output: Contribution to journalArticleScientificpeer-review

  20. 2001
  21. Published

    Monitoring chromia/alumina catalysts in situ during propane dehydrogenation by optical fiber UV-visible diffuse reflectance spectroscopy

    Puurunen, R. L., Beheydt, B. G. & Weckhuysen, B. M., 2001, In : Journal of Catalysis. 204, p. 253-257

    Research output: Contribution to journalArticleScientificpeer-review

  22. Published

    Successive reactions of gaseous trimethylaluminium and ammonia on porous alumina

    Puurunen, R. L., Lindblad, M., Root, A. & Krause, A. O. I., 2001, In : Physical Chemistry Chemical Physics. 3, p. 1093-1102

    Research output: Contribution to journalArticleScientificpeer-review

  23. 2000
  24. Published

    Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition

    Puurunen, R. L., Root, A., Sarv, P., Haukka, S., Iiskola, E. I., Lindblad, M. & Krause, A. O. I., 2000, In : Applied Surface Science. 165, p. 193-202

    Research output: Contribution to journalArticleScientificpeer-review

  25. Published

    IR and NMR Study of the Chemisorption of Ammonia on Trimethylaluminium-Modified Silica

    Puurunen, R. L., Root, A., Haukka, S., Iiskola, E., Lindblad, M. & Krause, A. O. I., 2000, In : Journal of Physical Chemistry B. 104, p. 6599-6609

    Research output: Contribution to journalArticleScientificpeer-review

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