Research output per year
Research output per year
Search results
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2022
Optical metrology of 3D thin film conformality by LHAR chip assisted method
Utriainen, M., Saastamoinen, K., Rekola, H., Ylivaara, O. M. E., Puurunen, R. L. & Hyttinen, P., 5 Mar 2022, Photonic Instrumentation Engineering IX. Busse, L. E., Soskind, Y. & Mock, P. C. (eds.). SPIE, 120080D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12008).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Open AccessFile5 Citations (Scopus)124 Downloads (Pure) -
2017
Biocompatible ALD barrier coatings for medical devices
Matvejeff, M., Ek, S., Ritasalo, R., Kalliomaki, J., Jarvinen, P., Ylivaara, O. & Ostreng, E., 2017, 2017 IEEE ELECTRON DEVICES TECHNOLOGY AND MANUFACTURING CONFERENCE (EDTM). IEEE, p. 56-58 3 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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2014
On the Early History of ALD: Molecular Layering
Aarik, J., Akbashev, A. R., Cameron, D., Elam, J., Elliott, S., Gottardi, G., Grigoras, K., Koshtyal, Y., Kääriäinen, M.-L., Kääriäinen, T., Malkov, A., Malygin, A., Molarius, J., Nikkola, J., Pedersen, H., Puurunen, R. L., Ras, R. H. A., Roozeboom, F., Savin, H. & Seidel, T. E. & 3 others, , 2014, 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Overview of early publications on Atomic Layer Deposition
Aarik, J., Akbashev, A. R., Cameron, D., Elam, J., Elliott, S., Gottardi, G., Grigoras, K., Koshtyal, Y., Kääriäinen, M.-L., Kääriäinen, T., Malkov, A., Malygin, A., Molarius, J., Nikkola, J., Pedersen, H., Puurunen, R. L., Ras, R. H. A., Roozeboom, F., Savin, H. & Seidel, T. E. & 3 others, , 2014, 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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Overview of early publications on Atomic Layer Deposition
Aarik, J., Akbashev, A. R., Cameron, D., Elam, J., Elliott, S., Gottardi, G., Grigoras, K., Koshtyal, Y., Kääriäinen, M.-L., Kääriäinen, T., Malkov, A., Malygin, A., Molarius, J., Nikkola, J., Pedersen, H., Puurunen, R. L., Ras, R. H. A., Roozeboom, F., Savin, H. & Seidel, T. E. & 3 others, , 2014, Technical Program & Abstracts. American Vacuum SocietyResearch output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
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2011
Direct wafer bonding of atomic layer deposited TiO2 and Al 2O3 thin films
Puurunen, R. L., Suni, T., Ylivaara, O., Kondo, H., Ammar, M., Ishida, T., Fujita, H., Bosseboeuf, A., Zaima, S. & Kattelus, H., 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. p. 978-981 4 p. 5969474Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
6 Citations (Scopus) -
2010
Bonding of ALD alumina for advanced SOI substrates
Suni, T., Puurunen, R. L., Ylivaara, O., Kattelus, H., Henttinen, K., Ishida, T. & Fujita, H., 2010, Semiconductor Wafer Bonding 11: Science, Technology, and Applications - In Honor of Ulrich Gosele. 4 ed. Vol. 33. p. 137-144 8 p.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
8 Citations (Scopus)