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• ALD Al2O3 thickness profile in microscopic rectangular channel, TMA-water 300 degC 500 cycles, PillarHall(TM) LHAR3-1b, V0001

  Ylivaara, O. (Creator), Puurunen, R. (Creator) & Marles, J. (Creator), Zenodo, 31 May 2021

  DOI: 10.5281/zenodo.3974438, https://zenodo.org/record/3974438

  Dataset