Research output per year
Research output per year
Personal profile
Expertise related to UN Sustainable Development Goals
In 2015, UN member states agreed to 17 global Sustainable Development Goals (SDGs) to end poverty, protect the planet and ensure prosperity for all. This person’s work contributes towards the following SDG(s):
Education/Academic qualification
Dipl.ins., materiaalitekniikka, kalliotekniikka
Award Date: 29 Mar 2005
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Dive into the research topics where Oili Ylivaara is active. These topic labels come from the works of this person. Together they form a unique fingerprint.
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Collaborations and top research areas from the last five years
Recent external collaboration on country/territory level. Dive into details by clicking on the dots or
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Optical metrology of 3D thin film conformality by LHAR chip assisted method
Utriainen, M., Saastamoinen, K., Rekola, H., Ylivaara, O. M. E., Puurunen, R. L. & Hyttinen, P., 5 Mar 2022, Photonic Instrumentation Engineering IX. Busse, L. E., Soskind, Y. & Mock, P. C. (eds.). SPIE, 120080D. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 12008).Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Open AccessFile5 Citations (Scopus)109 Downloads (Pure) -
Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
Ylivaara, O. M. E., Langner, A., Ek, S., Malm, J., Julin, J., Laitinen, M., Ali, S., Sintonen, S., Lipsanen, H., Sajavaara, T. & Puurunen, R. L., 1 Dec 2022, In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 40, 6, 10 p., 062414.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile2 Citations (Scopus)85 Downloads (Pure) -
Mechanical and optical properties of as-grown and thermally annealed titanium dioxide from titanium tetrachloride and water by atomic layer deposition
Ylivaara, O. M. E., Langner, A., Liu, X., Schneider, D., Julin, J., Arstila, K., Sintonen, S., Ali, S., Lipsanen, H., Sajavaara, T., Hannula, S.-P. & Puurunen, R. L., 31 Aug 2021, In: Thin Solid Films. 732, 11 p., 138758.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile22 Citations (Scopus)233 Downloads (Pure) -
Saturation profile measurement of atomic layer deposited film by X-ray microanalysis on lateral high-aspect-ratio structure
Haimi, E., Ylivaara, O., Yim, J. & Puurunen, R., 1 Sept 2021, In: Applied Surface Science Advances. 5, 5 p., 100102.Research output: Contribution to journal › Article › Scientific › peer-review
Open AccessFile119 Downloads (Pure) -
Al2O3 Thin Films Prepared by a Combined Thermal-Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications
Zhu, Z., Merdes, S., Ylivaara, O. M. E., Mizohata, K., Heikkila, M. J. & Savin, H., 1 Apr 2020, In: Physica Status Solidi (A) Applications and Materials Science. 217, 8, 5 p., 1900237.Research output: Contribution to journal › Article › Scientific › peer-review
6 Citations (Scopus)
Datasets
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ALD Al2O3 thickness profile in microscopic rectangular channel, TMA-water 300 degC 500 cycles, PillarHall(TM) LHAR3-1b, V0001
Ylivaara, O. (Creator), Puurunen, R. (Creator) & Marles, J. (Creator), Zenodo, 31 May 2021
DOI: 10.5281/zenodo.3974438, https://zenodo.org/record/3974438
Dataset