Mika Koskenvuori

Research outputs

  1. 2015
  2. Published

    Electrostatic and RF-Properties of MEMS Structures

    Tittonen, I. & Koskenvuori, M., 1 Jan 2015, Handbook of Silicon Based MEMS Materials and Technologies: Micro and Nano Technologies. 2 ed. Elsevier Inc., p. 294-312 19 p.

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

  3. 2010
  4. Published

    Electrostatic and RF-Properties of MEMS Structures

    Tittonen, I. & Koskenvuori, M., 1 Dec 2010, Handbook of Silicon Based MEMS Materials and Technologies: Micro and Nano Technologies. Elsevier Inc., p. 221-237 17 p.

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

  5. Published

    Resonators, resonator arrays, apparatus and methods

    Oksanen, M., Tittonen, I. & Koskenvuori, M., 2010, Patent No. US2010295632 (A1)

    Research output: PatentScientific

  6. 2008
  7. Published

    GHz-range FSK-reception with microelectromechanical resonators

    Koskenvuori, M., Tittonen, I. & Alastalo, A., 2008, In : Sensors and Actuators A: Physical. 142, 1, p. 346-351

    Research output: Contribution to journalArticleScientificpeer-review

  8. Published

    Parametrically amplified microelectromechanical mixer

    Koskenvuori, M. & Tittonen, I., 2008, IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008. IEEE, p. 78-81 (Proceedings : IEEE micro electro mechanical systems).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  9. Published

    Parametrically amplified Microelectromechanical Mixer

    Koskenvuori, M. & Tittonen, I., 2008, The XLII Annual Conference of the Finnish Physical Society 2008. Kärki, O., Lahti, P. & Suominen, K-A. (eds.). University of Turku, (Report series / Department of Physics. University of Turku. L; no. 31).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  10. Published

    Teknillisestä korkeakoulusta vuosina 2003-2007 valmistuneuden tohtoreiden työllistyminen

    Koskenvuori, M., 2008, Espoo, (Hallinto-osaston julkaisuja; no. 2008/11).

    Research output: Working paperProfessional

  11. Published

    Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

    Koskenvuori, M., Kaajakari, V., Mattila, T. & Tittonen, I., 2008, IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008. IEEE, p. 1044-1047 (Proceedings : IEEE micro electro mechanical systems).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  12. Published
  13. 2007
  14. Published

    Atomic layer deposition enhanced rapid dry fabrication of micromechanical devices with cryogenic deep raective ion etching

    Chekurov, N., Koskenvuori, M., Airaksinen, V-M. & Tittonen, I., 2007, In : Journal of Micromechanics and Microengineering. 17, 8

    Research output: Contribution to journalArticleScientificpeer-review

  15. Published

    Atomic layer deposition enhanced rapid fabrocation of released micromechanical devices for research purposes

    Chekurov, N., Koskenvuori, M., Airaksinen, V-M. & Tittonen, I., 2007, Physics Days, XLI Annual Conference of the Finnish Physical Society, Tallinn, Estonia, 15-17 March.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  16. Published

    Fast dry fabrication process with ultra thin atomic layer deposited mask for released MEMS-devices with high electromechanical coupling

    Chekurov, N., Koskenvuori, M., Airaksinen, V-M. & Tittonen, I., 2007, Transducers'07 & Eurosensors XXI conference, Lyon, France, 10-14 June.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  17. Published

    Fast Kelvin-probe Type Method for Measuring the Built-in voltage Inside Clodes Cavity MEMS-devices

    Koskenvuori, M., Rytkönen, V-P., Rantakari, P. & Tittonen, I., 2007, ICMAT 2007, Singapore, 1-6 July 2007. p. 122-125

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  18. Published
  19. Published

    Method for a fast measurement of built-in voltage inside closed cavity MEMS-devices

    Koskenvuori, M., Rytkönen, V-P., Rantakari, P. & Tittonen, I., 2007, In : Journal of Physics D: Applied Physics. 40, 18, p. 5558-5563

    Research output: Contribution to journalArticleScientificpeer-review

  20. 2006
  21. Published

    Prebreakdown emission in capacitive microsystems

    Chekurov, N., Koskenvuori, M. & Tittonen, I., 2006, The XL Annual Conference of the Finnish Physical Society. p. 128

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  22. Published

    Towards micromechanical radio: GHz-range communication with micromechanical resonators

    Koskenvuori, M., Alastalo, A. T., Dekker, J., Seppä, H. & Tittonen, I., 2006, The XL Annual Conference of the Finnsh Physical Society. p. 121

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  23. Published

    Towards Micromechanical Radio: GHz-range Communication with Micromechanical Resonators

    Koskenvuori, M. & Tittonen, I., 2006, Eurosensors XX, Göteborg, Ruotsi, 2006. p. 332

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  24. 2005
  25. Published

    13MHz Reference Oscillator Based on a Single-Crystal Silicon Microresonator

    Rantakari, P., Kaajakari, V., Kiihamäki, J., Koskenvuori, M. & Tittonen, I., 2005, Proceedings of the XXXIX Annual Conference of the Finnish Physical Society. Ruokola, T. & von Boehm, J. (eds.). Helsinki University of Technology, (Report / Helsinki University of Technology, Laboratory of Physics; no. 229).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  26. Published

    Built-in Potentials Affecting the Stability of Micromechanical Systems

    Koskenvuori, M., Rytkönen, V-P., Rantakari, P. & Tittonen, I., 2005, Proceedings of the XXXIX Annual Conference of the Finnish Physical Society. Ruokola, T. & von Boehm, J. (eds.). Helsinki University of Technology, (Report / Helsinki University of Technology, Laboratory of Physics; no. 229).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  27. Published

    Low Noise Silicon Micromechanical Bulk Acoustic Wave Oscillator

    Kaajakari, V., Rantakari, P., Koskinen, J. K., Mattila, T., Kiihamäki, J., Koskenvuori, M., Tittonen, I. & Oja, A., 2005, 2005 IEEE Ultrasonics Symposium. IEEE, (IEEE International Ultrasonics Symposium, Rottedam, The Netherlands, 18-21 September).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  28. 2004
  29. Published

    A Micromechanical Resonating RF Mixer

    Alastalo, A., Koskenvuori, M., Seppä, H. & Dekker, J., 2004, 34th European Microwave Conference, Amsterdam, The Netherlands, October 12-14 2004.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  30. Published

    Long-term stability of single-crystal silicon microresonators

    Koskenvuori, M., Mattila, T., Häärä, A., Kiihamäki, J., Oja, A., Seppä, H. & Tittonen, I., 2004, In : Sensors and Actuators A: Physical. 115, p. 23-27

    Research output: Contribution to journalArticleScientificpeer-review

  31. Published

    Long-term stability of SOI-microresonators

    Koskenvuori, M., Mattila, T., Häärä, A., Kiihamäki, J., Rantakari, P., Oja, A., Seppä, H. & Tittonen, I., 2004, The XXXVIII Annual Conference of the Finnish Physical Society, Oulu, Finland, March 18-20 2004. Oulu, Finland, p. 307

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  32. Published

    Major improvement og long-term stability of SOI-microresonators by encapsulation

    Koskenvuori, M., Mattila, T., Häärä, A., Kiihamäki, J., Rantakari, P., Oja, A., Seppä, H. & Tittonen, I., 2004, Eurosensors XVIII, Rome, Italy, September 12-15 2004. p. 550-551

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  33. Published

    Silicon Micromechanical Resonators for RF- Applications

    Mattila, T., Kaajakari, V., Kiihamäki, J., Oja, A., Kattelus, H., Seppä, H., Koskenvuori, M., Rantakari, P. & Tittonen, I., 2004, In : Physica Scripta. 114, p. 181-183

    Research output: Contribution to journalArticleScientificpeer-review

  34. 2003
  35. Published

    Active Post-processing method to increase the electro-mechanical coupling in microresonators

    Koskenvuori, M., Rantakari, P., Väisäsvaara, J., Tittonen, I., Mattila, T., Oja, A., Kaajakari, V., Seppä, H., Kattelus, H. & Kiihamäki, J., 2003, Eurosensors VXII, Guimarães, Portugal, September 2003. Eurosensors VXII, p. 675-676

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  36. Published

    Microresonators with active post-processing gap adjustment

    Koskenvuori, M., Rantakari, P., Väisäsvaara, J., Tittonen, I., Mattila, A., Oja, A., Kaajakari, V., Seppä, H., Kattelus, H. & Kiihamäki, J., 2003, XXXVII Annual Conference of Finnish Physical Society, Helsinki, April 2003. p. 07

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  37. Published

    Square-Extensional Mode Single-Crystal Silicon Micromechanical Resonator

    Kaajakari, V., Mattila, T., Oja, A., Kattelus, H., Kiihamäki, J., Koskenvuori, M., Rantakari, P., Tittonen, I. & Seppä, H., 2003, Transducers '03, Boston, USA, June, 2003. Boston, USA: Transducers '03, p. 951-954

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  38. 2002
  39. Published

    Enhancing the Electromechanical Coupling in Bulk Acoustic Mode Microresonator

    Koskenvuori, M., Rantakari, P., Lamminmäki, T., Tittonen, I., Oja, A., Mattila, T., Seppä, H., Kiihamäki, J. & Kattelus, H., 2002, Eurosensors XVI, Prague, Czech Republic, September 13-19, 2002. p. 383-384

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  40. Published

    High-Q micromechanical length extensional mode resonator

    Rantakari, P., Koskenvuori, M., Lamminmäki, T. & Tittonen, I., 2002, Proceedings of the XXXVI annual conference of the Finnish Physical Society. Tervo, J., Pääkkönen, P. & Kuittinen, M. (eds.). University of Joensuu, (XXXVI Annual Conference of the Finnish Physical Society, Joensuu, Finland, March 14-16, 2002)(Selected papers / University of Joensuu, Department of Physics; no. 7).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  41. Published

    Nonlinear Effects in Bulk Acoustic Mode Microresonators

    Koskenvuori, M., Oja, A., Mattila, T., Seppä, H., Kiihamäki, J., Kattelus, H., Lamminmäki, T., Rantakari, P. & Tittonen, I., 2002, Eurosensors XVI, Prague, Czech Republic, September, 2002. p. 381-382

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  42. Published

    Very High-Q Micromechanical 14 MHz Resonator on SOI

    Koskenvuori, M., 2002, Fourth International Conference on Materials for Microelectronics and Nanoengineering, Espoo, Finland, June, 2002. p. 129-132

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  43. 2001
  44. Published

    Mechanical silicon resonators for RF electronics

    Koskenvuori, M., Lamminmäki, T., Rantakari, P. & Tittonen, I., 2001, p. 111, (XXXV Annual Conference of the Finnish Physical Society, Jyvaskyla, Finland, March 22-24, 2001).

    Research output: Working paperProfessional

  45. Published

    Reducing the Effect of Parasitic Capacitance on MEMS Measurements

    Rantakari, P., Kiihamaki, J., Koskenvuori, M., Lamminmaki, T. & Tittonen, I., 2001, p. 1556-1559, (Transducers '01, Eurosensors XV, Munich, Germany, June 10-14, 2001).

    Research output: Working paperProfessional

ID: 68995