Mervi Paulasto-Kröckel

Professor (Associate Professor)

Research outputs

  1. 2020
  2. Published

    Metalorganic chemical vapor deposition of aluminum nitride on vertical surfaces

    Österlund, E., Suihkonen, S., Ross, G., Torkkeli, A., Kuisma, H. & Paulasto-Kröckel, M., 1 Feb 2020, In : Journal of Crystal Growth. 531, 125345.

    Research output: Contribution to journalArticleScientificpeer-review

  3. 2019
  4. Published

    In-situ annealing characterization of atomic-layer-deposited Al2O3 in N2 , H2 and vacuum atmospheres

    Broas, M., Lemettinen, J., Sajavaara, T., Tilli, M., Vuorinen, V., Suihkonen, S. & Paulasto-Kröckel, M., 31 Jul 2019, In : Thin Solid Films. 682, p. 147-155 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  5. Published

    Atomic layer deposition of piezoelectric aluminum nitride thin films

    Österlund, E., Seppänen, H. & Paulasto-Kröckel, M., 16 Jul 2019.

    Research output: Contribution to conferencePosterScientific

  6. Published

    Mechanical properties and reliability of aluminum nitride thin films

    Österlund, E., Kinnunen, J., Rontu, V., Torkkeli, A. & Paulasto-Kröckel, M., 25 Jan 2019, In : Journal of Alloys and Compounds. 772, p. 306-313 8 p.

    Research output: Contribution to journalArticleScientificpeer-review

  7. Published

    The Role of Ultrafine Crystalline Behavior and Trace Impurities in Copper on Intermetallic Void Formation

    Ross, G., Malmberg, P., Vuorinen, V. & Paulasto-Kröckel, M., 2019, In : ACS Applied Electronic Materials. 1, 1, p. 88-95 8 p.

    Research output: Contribution to journalArticleScientificpeer-review

  8. 2018
  9. Published

    Process Integration and Reliability of Wafer Level SLID Bonding for Poly-Si TSV capped MEMS

    Vuorinen, V., Ross, G., Viljanen, H., Decker, J. & Paulasto-Krockel, M., 26 Nov 2018, Proceedings of the 2018 7th Electronic System-Integration Technology Conference, ESTC 2018. IEEE, 6 p. 8546398

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  10. Published

    The effect of platinum contact metallization on Cu/Sn bonding

    Rautiainen, A., Ross, G., Vuorinen, V., Dong, H. & Paulasto-Kröckel, M., 16 Jul 2018, In : Journal of Materials Science: Materials in Electronics. 11 p.

    Research output: Contribution to journalArticleScientificpeer-review

  11. Published

    Wafer-Level AuSn/Pt Solid-Liquid Interdiffusion Bonding

    Rautiainen, A., Vuorinen, V., Heikkinen, H. & Paulasto-Krockel, M., Feb 2018, In : IEEE Transactions on Components, Packaging and Manufacturing Technology. 8, 2, p. 169-176

    Research output: Contribution to journalArticleScientificpeer-review

  12. Published

    Stability of Piezoelectric Al1-xScxN Thin Films

    Österlund, E., Ross, G. & Paulasto-Kröckel, M., 15 Jan 2018.

    Research output: Contribution to conferencePosterScientific

  13. Published

    Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

    Rontu, V., Sippola, P., Broas, M., Ross, G., Lipsanen, H., Paulasto-Kröckel, M. & Franssila, S., Jan 2018, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 36, 2, 021508.

    Research output: Contribution to journalArticleScientificpeer-review

  14. 2017
  15. Published

    Blistering mechanisms of atomic-layer-deposited AlN and Al2O3 films

    Broas, M., Jiang, H., Graff, A., Sajavaara, T., Vuorinen, V. & Paulasto-Kröckel, M., 2 Oct 2017, In : Applied Physics Letters. 111, 14, p. 1-4 4 p., 141606.

    Research output: Contribution to journalArticleScientificpeer-review

  16. Published

    Chemically Stable Atomic-Layer-Deposited Al2O3 Films for Processability

    Broas, M., Kanninen, O., Vuorinen, V., Tilli, M. & Paulasto-Kröckel, M., 31 Jul 2017, In : ACS Omega. 2, 7, p. 3390-3398 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  17. Published

    Interfacial void segregation of Cl in Cu-Sn micro-connects

    Ross, G., Tao, X., Broas, M., Mäntyoja, N., Vuorinen, V., Graff, A., Altmann, F., Petzold, M. & Paulasto-Kröckel, M., 10 Jul 2017, In : ELECTRONIC MATERIALS LETTERS. 13, 4, p. 307-312 6 p.

    Research output: Contribution to journalArticleScientificpeer-review

  18. Published

    Force measurements during posterior calvarial vault osteodistraction: A novel measurement method

    Ritvanen, A., Savolainen, M., Nowinski, D., Saiepour, D., Paulasto-Kröckel, M., Hukki, J., Tukiainen, E. & Leikola, J., 1 Jun 2017, In : Journal of Cranio-Maxillofacial Surgery. 45, 6, p. 981-989 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  19. Published

    Interfacial Reactions Between ZnAl(Ge) Solders on Cu and Ni Substrates

    Rautiainen, A., Vuorinen, V. & Paulasto-Kröckel, M., 1 Apr 2017, In : Journal of Electronic Materials. 46, 4, p. 2323-2333 11 p.

    Research output: Contribution to journalArticleScientificpeer-review

  20. Published

    Key parameters influencing Cu-Sn interfacial void formation

    Ross, G., Vuorinen, V. & Paulasto-Kröckel, M., 23 Feb 2017, Proceedings of the 18th IEEE Electronics Packaging Technology Conference, EPTC 2016. IEEE, p. 459-467 9 p. (Electronics Packaging Technology Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

  21. Published

    Gigahertz scanning acoustic microscopy analysis of voids in Cu-Sn micro-connects

    Ross, G., Vuorinen, V., Petzold, M., Paulasto-Kröckel, M. & Brand, S., 2017, In : Applied Physics Letters. 110, 5, 5 p., 054102.

    Research output: Contribution to journalArticleScientificpeer-review

  22. Published

    Vertical cracking of Cu-Sn solid-liquid interdiffusion bond under thermal shock test

    Rautiainen, A., Vuorinen, V., Li, J. & Paulasto-Kröckel, M., 2017, Proceedings of the 2nd International Conference on Integrated Functional nano Systems, nanoFIS 2016 . Köck, A. (ed.). Elsevier, p. 7083-7092 10 p. (Materials Today: Proceedings; vol. 4, no. 7, Part 2).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  23. Published

    XRD and ToF-SIMS study of intermetallic void formation in Cu-Sn micro-connects

    Ross, G., Vuorinen, V., Krause, M., Reissaus, S., Petzold, M. & Paulasto-Kröckel, M., 2017, In : Microelectronics Reliability. 76-77, p. 390-394

    Research output: Contribution to journalArticleScientificpeer-review

  24. 2016
  25. Published

    Thermodynamic reassessment of the Au-Pt-Sn system and microstructural evolution of the (AuSn)eut-Pt interconnection

    Dong, H., Vuorinen, V., Broas, M. & Paulasto-Kröckel, M., 15 Dec 2016, In : Journal of Alloys and Compounds. 688, p. 388-398 11 p.

    Research output: Contribution to journalArticleScientificpeer-review

  26. Published

    Comparative study on radio frequency and reliability performance of electronically conductive adhesives

    Österlund, E., Vuorinen, V., Jokilahti, J., Galkin, T., Salmela, O. & Paulasto-Krockel, M., 1 Dec 2016, 2016 6th Electronic System-Integration Technology Conference, ESTC 2016. IEEE, 5 p. 7764732

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  27. Published

    Microstructural Evolution and Mechanical Properties in (AuSn)eut-Cu Interconnections

    Dong, H., Vuorinen, V., Laurila, T. & Paulasto-Kröckel, M., Oct 2016, In : Journal of Electronic Materials. 45, 10, p. 5478–5486 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  28. Published

    Optimization of contact metallizations for reliable wafer level Au[sbnd]Sn bonds

    Vuorinen, V., Rautiainen, A., Heikkinen, H. & Paulasto-Kröckel, M., 1 Sep 2016, In : Microelectronics Reliability. 64, p. 676-680 5 p.

    Research output: Contribution to journalArticleScientificpeer-review

  29. Published

    Void formation and its impact on Cu-Sn intermetallic compound formation

    Ross, G., Vuorinen, V. & Paulasto-Kröckel, M., 25 Aug 2016, In : Journal of Alloys and Compounds. 677, p. 127-138 12 p.

    Research output: Contribution to journalArticleScientificpeer-review

  30. Published

    Choice of osteoblast model critical for studying the effects of electromagnetic stimulation on osteogenesis in vitro

    Bique, M., Kaivosoja, E., Mikkonen, M. & Paulasto-Kröckel, M., 1 Jul 2016, In : ELECTROMAGNETIC BIOLOGY AND MEDICINE. 35, 4, p. 353-364 12 p.

    Research output: Contribution to journalArticleScientificpeer-review

  31. Published

    Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride films

    Broas, M., Sippola, P., Sajavaara, T., Vuorinen, V., Pyymaki Perros, A., Lipsanen, H. & Paulasto-Kröckel, M., 1 Jul 2016, In : JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A. 34, 4, p. 1-10 10 p., 041506.

    Research output: Contribution to journalArticleScientificpeer-review

  32. Published

    Design for reliability of Au-Sn and Cu-Sn based SLID bonds

    Vuorinen, V., Rautiainen, A. & Paulasto-Kröckel, M., 25 Jan 2016, 20th European Microelectronics and Packaging Conference and Exhibition. IEEE, 6 p. 7390735

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  33. Published

    Extremely low frequency electromagnetic stimulation alters osteoblast actin filament morphology

    Bique, A-M., Keskinen, T. & Paulasto-Kröckel, M., 2016, IFMBE Proceedings. Jarm, T. & Kramar, P. (eds.). Vol. 53. p. 155-158 4 p. (IFMBE proceedings; vol. 53).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  34. Published

    Microstructural evolution and mechanical properties of Au-20wt.%Sn|Ni interconnection

    Dong, H., Vuorinen, V., Liu, X., Laurila, T., Li, J. & Paulasto-Kröckel, M., 2016, In : Journal of Electronic Materials. 45, 1, p. 566-575

    Research output: Contribution to journalArticleScientificpeer-review

  35. 2015
  36. Published

    Handbook of Silicon Based MEMS Materials and Technologies: Second Edition

    Tilli, M., Motooka, T., Airaksinen, V. M., Franssila, S., Paulasto-Kröckel, M. & Lindroos, V., 1 Jan 2015, Elsevier Inc. 787 p.

    Research output: Book/ReportAnthologyScientificpeer-review

  37. Published

    Introduction to Encapsulation and Integration of MEMS

    Kuisma, H. & Paulasto-Kröckel, M., 1 Jan 2015, Handbook of Silicon Based MEMS Materials and Technologies: Second Edition. Elsevier Inc., p. 585-590 6 p.

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

  38. Published

    Galvanic corrosion of silicon-based thin films: A case study of a MEMS microphone

    Broas, M., Li, J., Liu, X., Ge, Y., Peltonen, A., Mattila, T. T. & Paulasto-Krockel, M., 2015, Electronic Components and Technology Conference (ECTC) , San Diego, 26-29 May 2015. IEEE, p. 453-459

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

  39. Published

    Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

    Broas, M., Liu, X., Ge, Y., Mattila, T. T. & Paulasto-Kröckel, M., 2015, In : Journal of Applied Physics. 117, 24, p. 245304-1-245304-9

    Research output: Contribution to journalArticleScientificpeer-review

  40. Published

    Handbook of silicon based MEMS materials and technologies

    Tilli, M., Motooka, T., Airaksinen, V-M., Franssila, S., Paulasto-Kröckel, M. & Lindroos, V., 2015, 2nd edition ed. London: Elsevier. 787 p.

    Research output: Book/ReportBookProfessional

  41. Published

    Microstructural Characterization and Mechanical Performance of Wafer-Level SLID Bonded Au-Sn and Cu-Sn Seal Rings for MEMS Encapsulation

    Rautiainen, A., Xu, H., Österlund, E., Li, J., Vuorinen, V. & Paulasto-Kröckel, M., 2015, In : Journal of Electronic Materials. 44, 11, p. 4533-4548

    Research output: Contribution to journalArticleScientificpeer-review

  42. Published

    Solid-state reaction of electroplated thin film Au/Sn couple at low temperatures

    Xu, H., Vuorinen, V., Dong, H. & Paulasto-Kröckel, M., 2015, In : Journal of Alloys and Compounds. 619, january 15, p. 325331

    Research output: Contribution to journalArticleScientificpeer-review

  43. Published

    Study on thermomechanical reliability of power modules and thermal grease pump-out mechanism

    Li, J., Myllykoski, P. & Paulasto-Kröckel, M., 2015, 16th EuroSimE 2015, Budapest, Hungary, April 20-22, 2015. Zhang, G. Q., Van Driel, W. D., Rodgers, P., Bailey, C. & de Saint Leger, O. (eds.). France: IEEE

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  44. Published

    Void Formation in Cu-Sn Micro-Connects

    Ross, G., Vuorinen, V. & Paulasto-Kröckel, M., 2015, Electronic Components and Technology Conference (ECTC), San Diego CA, 26-29 May 2015. Keser, B. & Braunisch, H. (eds.). p. 2193-2199 (Electronic Components and Technology Conference).

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

  45. 2014
  46. Published

    Void formation in Cu-Sn SLID bonding for MEMS

    Ross, G., Xu, H., Vuorinen, V. & Paulasto-Kröckel, M., 18 Nov 2014, Proceedings of the 5th Electronics System-Integration Technology Conference, ESTC 2014. IEEE, 6962843

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

  47. Published

    The reliability of microalloyed Sn-Ag-Cu solder interconnections under cyclic thermal and mechanical shock loading

    Mattila, T. T., Hokka, J. & Paulasto-Kröckel, M., 1 Nov 2014, In : Journal of Electronic Materials. 43, 11, p. 4090-4102 13 p.

    Research output: Contribution to journalArticleScientificpeer-review

  48. Published

    Thermal simulation of high-power Li-ion battery with LiMn1/3Ni1/3Co1/3O2 cathode on cell and module levels

    Abdul-Quadir, Y., Laurila, T., Karppinen, J. & Paulasto-Kröckel, M., Apr 2014, In : International Journal of Energy Research. 38, 5, p. 564-572 9 p.

    Research output: Contribution to journalArticleScientificpeer-review

  49. Published

    Heat generation in high power prismatic Li-ion battery cell with LiMnNiCoO2 cathode material

    Abdul-Quadir, Y., Laurila, T., Karppinen, J., Jalkanen, K., Vuorilehto, K., Skogström, L. & Paulasto-Kröckel, M., 2014, In : International Journal of Energy Research. 38, 11, p. 1424-1437

    Research output: Contribution to journalArticleScientificpeer-review

  50. Published

    Improved Methods for Development of High Reliability Electronics

    Li, J., Dong, H., Vuorinen, V., Karppinen, J., Mattila, T. T. & Paulasto-Kröckel, M., 2014, 2014 IEEE Aerospace Conference, Marck 1-8,2014Yellowstone conference center, Big Sky, Montana.. United States: IEEE

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  51. Published

    Mechanical characterization of SLID bonded Au-Sn and Cu-Sn interconnections for MEMS packaging

    Rautiainen, A., Österlund, E., Xu, H., Vuorinen, V. & Paulasto-Kröckel, M., 2014, Electronic Materials, Processes and Packaging for Space (EMPPS), ESA ESTEC, Netherlands, May 20-22, 2014.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionProfessional

  52. Published

    Reliability assessment of a MEMS microphone under mixed flowing gas environment and shock impact loading

    Li, J., Broas, M., Raami, J., Mattila, T. T. & Paulasto-Kröckel, M., 2014, In : Microelectronics Reliability. 54, 6-7, p. 1228-1234

    Research output: Contribution to journalArticleScientificpeer-review

  53. Published

    Reliability Performance of Au-Sn and Cu-Sn Wafer Level SLID Bonds for MEMS

    Xu, H., Rautiainen, A., Vuorinen, V., Österlund, E., Paulasto-Kröckel, M., Suni, T., Heikkinen, H. & Monnoyer, P., 2014, 5th Electronics System-Integration Technology Conference (ESTC), Helsinki, Finland, 16 18, 2014. IEEE

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

  54. Published

    Shock Impact Reliability and Failure Analysis of a Three-Axis MEMS Gyroscope

    Li, J., Broas, M., Makkonen, J., Mattila, T. T., Hokka, J. & Paulasto-Kröckel, M., 2014, In : Journal of Microelectromechanical Systems. 23, 2, p. 347-355

    Research output: Contribution to journalArticleScientificpeer-review

  55. Published

    Thermodynamic reassessment of Au-Cu-Sn ternary system

    Dong, H., Vuorinen, V., Tao, X., Laurila, T. & Paulasto-Kröckel, M., 2014, In : Journal of Alloys and Compounds. 588, p. 449-460

    Research output: Contribution to journalArticleScientificpeer-review

  56. 2013
  57. Published

    Guest editorial

    Liu, J. & Paulasto-Kröckel, M., 1 Jan 2013, In : Advances in Manufacturing. 1, 3

    Research output: Contribution to journalSpecial issueScientificpeer-review

  58. Published
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